Micro Polishing Force Control of the Polishing Machine with the Airbag Tool

AbstractIn this paper, the polishing force monitoring and the control method were implemented for the polishing machine with the airbag tool. Airbag tool has been known to be adaptable to the curvature variation such as the aspherical and the free-form surface. However, it was necessary to control the tool movement of vertical axis also because of the table rotational wobble and vibration. To solve it by the polishing force control, we installed another stepping motor to the z-axis. And the polishing force was measured with the load cell and controlled by the PID Labview controller. A few hundreds gram of the polishing force were well controlled under 0.8 second of the response time and 5% variation. An experiment was done to clean the edge burrs of the micro channel structure of width 87㎛ using the polishing force control. Key Words : Polishing(연마), Polishing force(연마 힘), Airbag tool(에어백 공구), Micro polishing(미세 연마), Real time force control(실시간 힘 제어) 1. 서 론 일정한 곡률의 평면이나 구면(spherical) 형태의 광학 표면이 아닌 비구면(aspherical)이나 자유곡면(free-from surface)의 광학 표면 연마 공정에 있어서는 공구나 연마경로에 대해 특별한 방법이 적용되어 왔다