论文信息 - Elastic properties and vibration of micro-machined structures subject to residual stresses

Elastic properties and vibration of micro-machined structures subject to residual stresses

This paper presents a theoretical derivation of the changes in resonant frequencies for micro-machined beams due to residual stress. It was found that the frequency increases with increasing strain: the change in the square of the frequency was proportional to the strain, and long slender beams show larger frequency changes. A method for determining Young's Modulus and strain from multiple frequency measurements is presented. The results are compared both to FEM analysis, as well as to experimental results from the literature.

J. Wylde | T.J. Hubbard

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