Sub-micron position measurement and control on precision machine tools with laser interferometry

Abstract The trend towards tighter part tolerances from precision machine tools is placing increased demands on position transducers on these machines. Improved accuracy, repeatability and resolution from the position transducers is required to match this trend. This paper describes a new performance modelling technique for laser interferometer systems. Each error affecting the measurement accuracy and repeatability is described in detail, along with the method to determine these performance measures. Two products from Hewlett-Packard — wavelength tracking compensation and the high resolution interferometer — are also described that will help meet the future measurement requirements for precision machine tools.