Widely tunable guided-mode resonance nanoelectromechanical RGB pixels.

Widely tunable display pixels are reported. The pixel consists of a subwavelength silicon-nitride/air membrane containing complementary fixed and mobile gratings. By altering the device refractive index profile and symmetry, using MEMS actuation methods, wavelength tuning across ~100 nm per pixel in the visible spectral region is shown to be possible. Initial results illustrating the influence of structural symmetry, pixel thickness, and polarization on the spectral response are provided. These pixels exhibit ~+/-4 degrees angular acceptance aperture. Applications in compact display systems are envisioned.

[1]  Jahja I. Trisnadi,et al.  Overview and applications of Grating-Light-Valve-based optical write engines for high-speed digital imaging , 2004, SPIE MOEMS-MEMS.

[2]  David M. Bloom,et al.  Grating Light Valve: revolutionizing display technology , 1997, Electronic Imaging.

[3]  R. Magnusson,et al.  Band gaps and leaky-wave effects in resonant photonic-crystal waveguides. , 2007, Optics express.

[4]  P. Vincent,et al.  Corrugated dielectric waveguides: A numerical study of the second-order stop bands , 1979 .

[5]  Kazuhiro Hane,et al.  Control of guided resonance in a photonic crystal slab using microelectromechanical actuators , 2007 .

[6]  S. S. Wang,et al.  Theory and applications of guided-mode resonance filters. , 1993, Applied optics.

[7]  O. Solgaard,et al.  Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs , 2003 .

[8]  Thomas K. Gaylord,et al.  Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach , 1995 .

[9]  T. Friedmann,et al.  Laterally deformable nanomechanical zeroth-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis. , 2003, Optics letters.

[10]  Robert Magnusson,et al.  Use of nondegenerate resonant leaky modes to fashion diverse optical spectra. , 2004, Optics express.

[11]  R. Magnusson,et al.  Resonant leaky-mode spectral-band engineering and device applications. , 2004, Optics express.

[12]  Bianca E. N. Keeler,et al.  Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer. , 2004, Optics letters.

[13]  Ivan Avrutsky,et al.  Reflection of a beam of finite size from a corrugated waveguide , 1989 .

[14]  R. F. Kazarinov,et al.  Second-order distributed feedback lasers with mode selection provided by first-order radiation losses , 1985 .

[15]  R. Magnusson,et al.  MEMS tunable resonant leaky mode filters , 2006, IEEE Photonics Technology Letters.