Flexible visual feedback for automated nanohandling inside an SEM

This paper describes the implementation of several key components that were used to build a prototype for a versatile camera system operating in a scanning electron microscope. For the precise alignment of the camera inside the vacuum chamber, a stick-slip-based actuator was developed, that can create a high torque while having small dimensions. The camera is mounted on a rail and carriage system and the implemented combination of absolute and relative optical sensors is described. Finally, several object tracking scenarios are defined and first results of implemented tracking algorithms are given.

[1]  Blake Hannaford,et al.  Kalman filter based calibration of precision motion control , 1995, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots.

[2]  Lazhar Ben-Brahim,et al.  A novel method for estimating the angle from analog co-sinusoidal quadrature signals , 2008 .

[3]  Kok Kiong Tan,et al.  New interpolation method for quadrature encoder signals , 2002, IEEE Trans. Instrum. Meas..

[4]  Sergej Fatikow,et al.  CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback , 2007, International Symposium on Optomechatronic Technologies.

[5]  Reymond Clavel,et al.  Issues in precision motion control and microhandling , 2000, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065).

[6]  Michael Heiss.  Error-detecting unit-distance code , 1990 .

[7]  O. Cornea,et al.  A new algorithm and device for absolute linear encoders dedicated to long distance applications , 2008, 2008 11th International Conference on Optimization of Electrical and Electronic Equipment.

[8]  Emil M. Petriu,et al.  Reconsidering natural binary encoding for absolute position measurement application , 1989 .

[9]  T. Sievers.  Global sensor feedback for automatic nanohandling inside a scanning electron microscope , 2006 .

[10]  Sergej Fatikow,et al.  Real-time object tracking for the robot-based nanohandling in a scanning electron microscope , 2006 .

[11]  A. Bergander,et al.  Performance improvements for stick-slip positioners , 2003, MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717).