论文信息 - Overcoming the excessive compressive strain in AlGaN epitaxy by introducing high Si-doping in AlN templates - 字舞流文

Overcoming the excessive compressive strain in AlGaN epitaxy by introducing high Si-doping in AlN templates

M. Weyers | Yuh-Renn Wu | Chia-Lung Tsai | Chia-Yen Huang | C. Netzel | S. Walde | Yi-Keng Fu | S. Hagedorn | Hsueh-Hsing Liu | Yuh‐Renn Wu