Materials Engineering for Future Interconnects: “Catalyst-Free” Electroless Cu Deposition on Self-Assembled Monolayer Alternative Barriers
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[1] G. Ramanath,et al. Annealing-induced interfacial toughening using a molecular nanolayer , 2007, Nature.
[2] C. A. Walsh,et al. Efficient photodiodes from interpenetrating polymer networks , 1995, Nature.
[3] K. Koumoto,et al. Seedless micropatterning of copper by electroless deposition on self-assembled monolayers , 2004 .
[4] Tetsuya Osaka,et al. Electroless Diffusion Barrier Process Using SAM on Low-k Dielectrics , 2007 .
[5] M. Preuss,et al. Coulombic amino group-metal bonding: adsorption of adenine on Cu110. , 2005, Physical review letters.
[6] G. Borghs,et al. Screening self-assembled monolayers as Cu diffusion barriers , 2008 .
[7] R. Xu,et al. Characterization of Polystyrene Latex Surfaces by Conductometric Titration, Rhodamine 6G Adsorption, and Electrophoresis Measurements , 2000 .
[8] Alexandra Inberg,et al. Electroless deposition and electrical resistivity of sub-100nm Cu films on SAMs: State of the art , 2007 .
[9] L. Pettersson,et al. The electronic structure and surface chemistry of glycine adsorbed on Cu(110) , 2000 .
[10] Chen,et al. Large On-Off Ratios and Negative Differential Resistance in a Molecular Electronic Device. , 1999, Science.
[11] Y. Yamaguchi,et al. Effect of interfacial interactions on the initial growth of Cu on clean SiO2 and 3-mercaptopropyltrimethoxysilane-modified SiO2 substrates , 2002 .
[12] R. Dauskardt,et al. Adhesion of polymer thin-films and patterned lines , 2003 .
[13] C. Pantano,et al. Hydroxylation and Dehydroxylation Behavior of Silica Glass Fracture Surfaces , 2002 .
[14] J. Stöhr,et al. Ammonia adsorbed on Cu(110): An angle resolved x-ray spectroscopic and ab initio study , 1999 .
[15] Michael Lane,et al. Adhesion and debonding of multi-layer thin film structures , 1998 .
[16] W. R. Salaneck,et al. Electroluminescence in conjugated polymers , 1999, Nature.
[17] R. Cook,et al. Four-point bend adhesion measurements of copper and permalloy systems , 2004 .
[18] G. Ramanath,et al. Gas‐phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W on TiN/Ti/SiO2 structures for integrated circuit fabrication , 1996 .
[19] R. Dauskardt,et al. Adhesion and reliability of copper interconnects with Ta and TaN barrier layers , 2000 .
[20] Shen-Ming Chen,et al. Electrochemical Analysis of H2O2 and Nitrite Using Copper Nanoparticles/Poly(o-phenylenediamine) Film Modified Glassy Carbon Electrode , 2009 .