论文信息 - Optimal Microwave properties of thin BSTO films for high frequency applications

Optimal Microwave properties of thin BSTO films for high frequency applications

The influence of deposition parameters on microwave properties of BaxSr1-xTiO3 (BSTO) films deposited on alumina substrate has been investigated in a wide frequency range (1-30 GHz). The best combination of high tunability (n) and low losses (tan ¿) at room temperature was obtained for the 30% Ba content target. The best BSTO films exhibited n = 2.1 and tan¿=0.016 at 1 GHz and zero bias. This result is among the best reported for sputtered BSTO on alumina substrates.

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