Crystallographic influence on nanomechanics of (100)-oriented silicon resonators

The influence of crystallographic orientation on the nanomechanical properties of 50 nm thick (100)-oriented single-crystal silicon resonators was investigated by examining the effects of surface treatments, such as flash-heating, on the mechanical quality factors (Q-factors) and resonant frequencies. The measured Q-factors were found to vary periodically with crystallographic orientation and were shown to have higher values in the 〈110〉 direction. A 1500 nm thick (100)-oriented cantilever array was also studied for comparison, for which no obvious periodic change was observed. Since the energy dissipation in vibrating resonators cannot be explained by the support loss or thermoelastic loss, a surface-related mechanism should be considered.

[1]  Masayoshi Esashi,et al.  Mass sensing of adsorbed molecules in sub-picogram sample with ultrathin silicon resonator , 2003 .

[2]  H. Rothuizen,et al.  Translating biomolecular recognition into nanomechanics. , 2000, Science.

[3]  White Be,et al.  Internal friction of subnanometer a-SiO2 films. , 1995 .

[4]  Masayoshi Esashi,et al.  Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers , 2000 .

[5]  Masayoshi Esashi,et al.  Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuum , 2003 .

[6]  Two-level states in glasses , 1987 .

[7]  T. Kenny,et al.  Quality factors in micron- and submicron-thick cantilevers , 2000, Journal of Microelectromechanical Systems.

[8]  C. Zener.  INTERNAL FRICTION IN SOLIDS II. GENERAL THEORY OF THERMOELASTIC INTERNAL FRICTION , 1938 .

[9]  D. Rugar,et al.  Force Detection of Nuclear Magnetic Resonance , 1994, Science.

[10]  M. Esashi,et al.  Resonance enhancement of micromachined resonators with strong mechanical-coupling between two degrees of freedom , 2003 .

[11]  C. A. Bolle,et al.  Observation of mesoscopic vortex physics using micromechanical oscillators , 1999, Nature.

[12]  F. Capasso,et al.  Quantum Mechanical Actuation of Microelectromechanical Systems by the Casimir Force , 2001, Science.

[13]  H. Hosaka,et al.  DAMPING CHARACTERISTICS OF BEAM-SHAPED MICRO-OSCILLATORS , 1995 .

[14]  D. Rugar,et al.  Mechanical parametric amplification and thermomechanical noise squeezing. , 1991, Physical review letters.

[15]  J. Wortman,et al.  Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium , 1965 .