Equivalent circuit model of reliable RF-MEMS switches for component synthesis, fabrication process characterization and failure analysis

An accurate and very large band (30–110 GHZ) lumped element equivalent circuit model of capacitive RF-MEMS components based on a standard 250 nm BiCMOS technology is presented. This model is able to predict the effect of the fabrication process dispersion, synthesize new components and monitor the failure mechanisms. Moreover, a reliability study is performed in order to define a screening criterion (VPOUT > 36 V and |VPIN − VPOUT| ≤ 1) based on which a selection of the devices with optimal performance in terms of RF and lifetime performance can be made. Finally, a very quick effective technique (non-intrusive) is proposed to carry out this operation.

[1]  Toshiyuki Tsuchiya,et al.  Reliability of MEMS , 2007 .

[2]  Nuria Torres-Matabosch,et al.  Design for reliability applied to RF-MEMS devices and circuits issued from different TRL environments , 2013 .

[3]  S.P. Voinigescu,et al.  30-100-GHz inductors and transformers for millimeter-wave (Bi)CMOS integrated circuits , 2005, IEEE Transactions on Microwave Theory and Techniques.

[4]  D. Dubuc,et al.  Carbon Nanotube Based Dielectric for Enhanced RF MEMS Reliability , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[5]  J.C.M. Hwang,et al.  Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[6]  H. Schumacher,et al.  RF-MEMS switch module in a 0.25 μm BiCMOS technology , 2012, 2012 IEEE 12th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.

[7]  I. De Wolf,et al.  Reliability of MEMS , 2006, EuroSime 2006 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems.

[8]  Stepan Lucyszyn,et al.  Advanced RF MEMS , 2010 .

[9]  R. R. Mansour,et al.  RF MEMS for space applications , 2005, 2005 International Conference on MEMS,NANO and Smart Systems.

[10]  Gabriel M. Rebeiz,et al.  Electromagnetic Modeling of MEMS Switches , 2004 .

[11]  R. Plana,et al.  An accurate and versatile equivalent circuit model for RF-MEMS circuit optimization in BiCMOS technology , 2012, 2012 7th European Microwave Integrated Circuit Conference.

[12]  Clark T.-C. Nguyen.  The harsh environment robust micromechanical technology (HERMiT) program: Success and some unfinished business , 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest.

[13]  M. Kaynak,et al.  Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads , 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest.

[14]  J. Oberhammer,et al.  A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm , 2008, Journal of Microelectromechanical Systems.

[15]  M. Kaynak,et al.  BiCMOS embedded RF-MEMS switch for above 90 GHz applications using backside integration technique , 2010, 2010 International Electron Devices Meeting.