루츠형 중진공펌프 국산화 개발

Due to a roots type medium vacuum pump is operated in condition of 1~10?³ torr vacuum, it could be applied for production and process of industrial parts, such as precise processing, vaporization, enrichment, separation, casting, metaling, welding, transportation. Therefore, the demand of this pump is increasing nowadays in our industrial markets of semiconductor, electric, electronic, automobile, material, environmental and transporting industries. However, the pumps arc almost imported, because the domestic pumps arc inferior in fields of vacuum range as under 10?¹torr, relevant techniques(design, fabrication, casting, test, etc.) to the imported ones. In this study, essential parts of the development pump arc designed with using of CFD and 3D decodes, FEM for analysing strength and deformation, generated heat, vibration and noise control, and arc casted with using of mechanochemistry techniques for decreasing of weights, increasing of heat resistances and abrasion durability of materials for pump caing and impellers especially. Besides, in order to achieve ultimate vacuum around 10?³torr, this pump is composed of 6 stages, among which tsr stage is operated separately from remained stages. Additionally, a test rig for prototype pumps(300㎥/h and 2,500㎥/h) is designed and procured as to apply for multi-staged rootz type vacuum pump, with modification of the test method recommended by KS B 6314 "Positive-displacement oil-sealed rotary vacuum pumps".