Free‐standing silicon microstructures fabricated by laser chemical processing

Laser‐assisted chemical‐vapor deposition (LCVD) is used for growth in ‘‘free space’’ of microscale fibers and helical structures of silicon. The LCVD technique is also used for fabrication of a tungsten coil on a cylindrical silicon substrate, i.e., a microsolenoid is realized. The microstructure of the silicon deposits is investigated by transmission electron microscopy, and their mechanical strength is evaluated by micromechanical testing in situ in a scanning electron microscope. The resistivity of the tungsten coil is measured, and the magnetic properties of the microsolenoid are investigated by means of superconducting quantum interference device equipment.