论文信息 - Investigation of the chemical state of ultrathin Hf-Al-O films during high temperature annealing [rapid communication] - 字舞流文

Investigation of the chemical state of ultrathin Hf-Al-O films during high temperature annealing [rapid communication]

N. Lee | R. Sinclair | H. Chang | M. Cho | D. Ko | D. Moon | J. H. Lee | Y. Cho | K. Min | Sung-Kwan Kang | J.J. Gu | J. Gu | M. H. Cho | R. Sinclair | Seung-Hee Kang | K. Min | Yeol Je Cho