Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances
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[1] James J. Allen,et al. Parallel-plate electrostatic dual-mass resonator , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[2] M. Gyimesi,et al. Finite-element simulation of micro-electromechanical systems (MEMS) by strongly coupled electromechanical transducers , 2004, IEEE Transactions on Magnetics.
[3] James J. Allen,et al. Parallel-Plate Electrostatic Dual Mass Oscillator , 1999 .
[4] Sung Kyu Ha,et al. Robust Design of a Decoupled Vibratory Microgyroscope Considering Over-Etching as a Fabrication Tolerance Factor , 2006 .
[5] Hao Yilong. Nodal Model Simulation of an Accelerometer , 2004 .
[6] Yong-Kweon Kim,et al. Two-mass system with wide bandwidth for SiOG (silicon on glass) vibratory gyroscopes , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[7] Zhenchuan Yang,et al. Simulation of a novel lateral axis micromachined gyroscope in the presence of fabrication imperfections , 2008 .
[8] B. Kwak,et al. Robust optimal design of a vibratory microgyroscope considering fabrication errors , 2001 .
[9] A.M. Shkel,et al. Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator , 2006, Journal of Microelectromechanical Systems.
[10] Andrei M. Shkel,et al. Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air , 2009 .
[11] Zhuangde Jiang,et al. 3D MEMS Design Method via SolidWorks , 2006, 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
[12] A.A. Trusov,et al. Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes , 2008, IEEE Sensors Journal.