Progress in gas purifiers for industrial excimer lasers

New Results on the trapping efficiency of cryogenic gas purifiers indicate that efficiencies of over 95 can be obtained. High power industrial excimer lasers operate at high buffer gas pressures and use large volume discharge vessels. A prototype gas purifier offering a circulation flow rate and operating pressure twice that of a conventional gas purifier has been developed. The performance and applicability of this device to industrial excimer lasers will be discussed.