论文信息 - Silicon heat pipes used as thermal spreaders

Silicon heat pipes used as thermal spreaders

An increase in power densities in electronic devices is a direct consequence of their miniaturization and performance improvements. We propose the use of flat miniature heat pipes with micro capillary grooves to spread heat flux across a heat sink. Models of the structure were developed to calculate heat transfer limitations and temperature drops. A brass/water prototype was fabricated to demonstrate the feasibility of heat spreading using this type of heat pipe. Simulation and experimental results obtained with the prototype are described. The dissipated power reached 110 W/cm/sup 2/ without heat transfer limitations. The results are then extended to the design of this type of heat pipe in silicon. Thermal performance was calculated. Simulation, experimental results and the fabrication process are presented.

[1] G. P. Peterson,et al. ULTRAHIGH-CAPACITY MICROMACHINED HEAT SPREADERS , 1998 .

[2] Karl W. Baker,et al. EXPERIMENTAL RESULTS FOR LOW-TEMPERATURE SILICON MICROMACHINED MICRO HEAT PIPE ARRAYS USING WATER AND METHANOL AS WORKING FLUIDS , 1997 .

[3] Mark H. Weichold,et al. Fabrication of vapor-deposited micro heat pipe arrays as an integral part of semiconductor devices , 1995 .

[4] Man Wong,et al. Characterization of an integrated micro heat pipe , 2003 .

[5] A. B. Duncan,et al. Experimental Investigation of Micro Heat Pipes Fabricated in Silicon Wafers , 1993 .

[6] S. Chi. Heat pipe theory and practice , 1976 .

[7] Shung-Wen Kang,et al. Fabrication of star grooves and rhombus grooves micro heat pipe , 2002 .

[8] J. E. Beam,et al. Experiments and Analyses of Flat Miniature Heat Pipes , 1997 .

[9] Shung-Wen Kang,et al. Fabrication and test of radial grooved micro heat pipes , 2002 .

[10] G. Schneider,et al. Non-dimensional analysis for the heat transport capability of axially grooved heat pipes including liquid/vapor interaction , 1980 .

[11] Amir Faghri,et al. Flat Miniature Heat Pipes With Micro Capillary Grooves , 1999 .

[12] Amir Faghri,et al. Heat Pipe Science And Technology , 1995 .