Fluid driven microactuator with feedback mechanism
暂无分享,去创建一个
Yasushi Ikei | Yoshikuni Okawa | Akihiro Koga | Y. Ikei | A. Koga | H. Morkiawa | Y. Okawa | H. Morkiawa
[1] J. Fluitman,et al. A thermopneumatic micropump based on micro-engineering techniques , 1990 .
[2] T. Masuzawa,et al. Micro electro-discharge machining and its applications , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..
[3] K. J. Gabriel,et al. In situ friction and wear measurements in integrated polysilicon mechanisms , 1990 .
[4] Yasushi Ikei,et al. A Study on Fluid Driven Microactuator , 1992 .
[5] M. Esashi,et al. A micro chemical analyzing system integrated on a silicon wafer , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..