Optical emission characteristics and mode transitions in low-frequency inductively coupled plasmas

An attempt was made to investigate the optical emission spectra of atomic, molecular, and ionic species in low-frequency, high-density ICP discharges in pure nitrogen, ar con gases, and gas mixtures Ar+H2, N2+Ar, and N2+H2. The excited species were identified by in situ optical emission intensity (OEI) measurements in the discharge chamber. In general, significant results were obtained.

[1]  M. Tuszewski.  Planar inductively coupled plasmas operated with low and high radio frequencies , 1999 .

[2]  A. Garscadden,et al.  Non-equilibrium electronic and vibrational kinetics in H2-N2 and H2 discharges , 1995 .

[3]  A. Ricard,et al.  On the axial structure of a nitrogen surface wave sustained discharge: Theory and experiment , 1999 .

[4]  J. Forster,et al.  Novel radio‐frequency induction plasma processing techniques , 1993 .

[5]  M. Pinheiro,et al.  Self-consistent kinetic model of low-pressure - flowing discharges: I. Volume processes , 1998 .

[6]  D. J. Economou,et al.  Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma , 1999 .

[7]  M. Pinheiro,et al.  Calculated data on electron transport and excitation rate coefficients in and discharges , 1997 .

[8]  I. Zhelyazkov,et al.  Self-consistent kinetic model of a surface-wave-sustained discharge in nitrogen , 1997 .

[9]  D. Vender,et al.  Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis , 1999 .

[10]  I. Jones,et al.  The electromagnetic basis of the transformer model for an inductively coupled RF plasma source , 1998 .

[11]  Vladimir I. Kolobov,et al.  Hot plasma and nonlinear effects in inductive discharges , 1999 .

[12]  Hideo Sugai,et al.  Power transfer efficiency and mode jump in an inductive RF discharge , 1998 .

[13]  D. Seo,et al.  Global model and scaling laws for inductively coupled oxygen discharge plasmas , 1999 .

[14]  M. Lieberman,et al.  Hysteresis and the E-to-H transition in radiofrequency inductive discharges , 1999 .

[15]  J. P. Rayner,et al.  Helicon modes in a cylindrical plasma source , 1999 .

[16]  V. Godyak,et al.  Second harmonic and ponderomotive forces acting on electrons in an inhomogeneous radio frequency field of an inductive discharge , 2000 .

[17]  A. Garscadden,et al.  Dissociation of hydrogen in glow discharges in hydrogen-nitrogen mixtures , 1994 .

[18]  J. Keller.  New and possible future trends in inductively coupled plasmas (ICPs) for semiconductor processing , 1997 .

[19]  Uwe R. Kortshagen,et al.  On the E - H mode transition in RF inductive discharges , 1996 .

[20]  J. Musil,et al.  Plasma nitriding combined with a hollow cathode discharge sputtering at high pressures , 1997 .

[21]  J. Feinstein,et al.  PONDEROMOTIVE TRANSPORT OF CHARGE IN THE INDUCTION PLASMA , 1994 .

[22]  S. Vepřek.  The search for novel, superhard materials , 1999 .

[23]  Dennis W. Hewett,et al.  Analytic model of power deposition in inductively coupled plasma sources , 1995 .

[24]  M. G. Tuszewski,et al.  Particle and heat transport in a low-frequency inductively coupled plasma , 1998 .

[25]  A. Wendt,et al.  Plasma properties determined with induction loop probes in a planar inductively coupled plasma source , 1996 .

[26]  C. Ferreira,et al.  Kinetic model of a low-pressure N/sub 2/-O/sub 2/ flowing glow discharge , 1995 .

[27]  M. Fewell,et al.  The Low-Pressure Rf Plasma as a Medium for Nitriding Iron and Steel , 1997 .

[28]  S. Xu,et al.  Bistability and hysteresis in inductively coupled plasmas , 2000 .

[29]  C. Guarnieri,et al.  Electromagnetic fields in a radio‐frequency induction plasma , 1993 .

[30]  I. R. Jones,et al.  Low-frequency, high-density, inductively coupled plasma sources: Operation and applications , 2001 .

[31]  Francis F. Chen,et al.  Industrial applications of low-temperature plasma physics , 1995 .

[32]  Sumio Ashida,et al.  Spatially averaged (global) model of time modulated high density argon plasmas , 1995 .

[33]  V. Guerra,et al.  Electron and heavy particle kinetics in a low-pressure nitrogen glow discharge , 1997 .

[34]  S. Xu,et al.  Hysteresis and mode transitions in a low-frequency inductively coupled plasma , 2000 .

[35]  C. Ferreira,et al.  Surface kinetics of N and O atoms in discharges , 1996 .