Micro and nano device — Customer-Oriented Product e-Engineering in e-CoFrame
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Tomasz Bieniek | Grzegorz Janczyk | Piotr Grabiec | Jerzy Szynka | Stanislaw Kalicinski | Pawel Janus
[1] Gisbert Holzer,et al. 3-D process modeling - A novel and efficient tool for MEMS foundry design support , 2009, 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.