Microelectrodes, Microelectronics, and Implantable Neural Microsystems

Lithographically defined microelectrode arrays now permit high-density recording and stimulation in the brain and are facilitating new insights into the organization and function of the central nervous system. They will soon allow more detailed mapping of neural structures than has ever before been possible, and capabilities for highly localized drug-delivery are being added for treating disorders such as severe epilepsy. For chronic neuroscience and neuroprosthesis applications, the arrays are being used in implantable microsystems that provide embedded signal processing and wireless data transmission to the outside world. A 64-channel microsystem amplifies the neural signals by 60 dB with a user-programmable bandwidth and an input-referred noise level of 8 muVrms before processing the signals digitally. The channels can be scanned at a rate of 62.5 kS/s, and signals above a user-specified biphasic threshold are transmitted wirelessly to the external world at 2 Mbps. Individual channels can also be digitized and viewed externally at high resolution to examine spike waveforms. The microsystem dissipates 14.14 mW from 1.8 V and measures 1.4 1.55 cm2.

[1]  M. P. Lepselter.  Beam-lead technology , 1966 .

[2]  Ying Yao,et al.  An Implantable Microsystem for Wireless Multi-Channel Cortical Recording , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[3]  Ken Wise,et al.  SE7 Implantable and Prosthetic Devices: Life-Changing Circuits , 2007, ISSCC.

[4]  Dawn M. Taylor,et al.  Direct Cortical Control of 3D Neuroprosthetic Devices , 2002, Science.

[5]  Hsiao-Wen Chung,et al.  An EEG spike detection algorithm using artificial neural network with multi-channel correlation , 1998, Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. Vol.20 Biomedical Engineering Towards the Year 2000 and Beyond (Cat. No.98CH36286).

[6]  Jon A. Mukand,et al.  Neuronal ensemble control of prosthetic devices by a human with tetraplegia , 2006, Nature.

[7]  R. Olsson,et al.  A three-dimensional neural recording microsystem with implantable data compression circuitry , 2005, ISSCC. 2005 IEEE International Digest of Technical Papers. Solid-State Circuits Conference, 2005..

[8]  K.D. Wise,et al.  A three-dimensional neural recording microsystem with implantable data compression circuitry , 2005, IEEE Journal of Solid-State Circuits.

[9]  James M. Bower,et al.  Plasma-etched neural probes , 1996 .

[10]  O. Ozdamar,et al.  Wavelet preprocessing for automated neural network detection of EEG spikes , 1995 .

[11]  K. Wise,et al.  A shuttered neural probe with on-chip flowmeters for chronic in vivo drug delivery , 2006, Journal of Microelectromechanical Systems.

[12]  D. Robinson,et al.  The electrical properties of metal microelectrodes , 1968 .

[13]  M. Verzeano,et al.  Neuronal Activity in Cortical and Thalamic Networks , 1960, The Journal of general physiology.

[14]  U. Hofmann,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a 32-site Neural Recording Probe Fabricated by Drie of Soi Substrates , 2022 .

[15]  Kensall D. Wise,et al.  Band-tunable and multiplexed integrated circuits for simultaneous recording and stimulation with microelectrode arrays , 2005, IEEE Transactions on Biomedical Engineering.

[16]  James D. Weiland,et al.  Chronic neural stimulation with thin-film, iridium oxide electrodes , 2000, IEEE Trans. Biomed. Eng..

[17]  M. Kuperstein,et al.  A Practical 24 Channel Microelectrode for Neural Recording in Vivo , 1981, IEEE Transactions on Biomedical Engineering.

[18]  Kensall D. Wise,et al.  A 256-Site 3D CMOS Microelectrode Array for Multipoint Stimulation and Recording in the Central Nervous System , 2001 .

[19]  Amir M. Sodagar,et al.  A Fully Integrated Mixed-Signal Neural Processor for Implantable Multichannel Cortical Recording , 2007, IEEE Transactions on Biomedical Engineering.

[20]  Daryl R. Kipke,et al.  Wireless implantable microsystems: high-density electronic interfaces to the nervous system , 2004, Proceedings of the IEEE.

[21]  D. A. Huntington,et al.  Electrical Stimulation of Acoustical Nerve and Inferior Colliculus: Results in Man , 1964 .

[22]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[23]  K. Wise,et al.  An integrated-circuit approach to extracellular microelectrodes. , 1970, IEEE transactions on bio-medical engineering.

[24]  H. Kodama,et al.  A computer-assisted spike detecting system using normalized method for epilepsy diagnosis , 1988, Proceedings of the Twenty-First Annual Hawaii International Conference on System Sciences, 1988. Vol.IV. Applications Track.

[25]  Sung June Kim,et al.  A micromachined silicon depth probe for multichannel neural recording , 2000, IEEE Transactions on Biomedical Engineering.

[26]  D. Kipke,et al.  Neural Probes for Concurrent Detection of Neurochemical and Electrophysiological Signals in vivo , 2005, 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference.

[27]  X. Beebe,et al.  Charge injection limits of activated iridium oxide electrodes with 0.2 ms pulses in bicarbonate buffered saline (neurological stimulation application) , 1988, IEEE Transactions on Biomedical Engineering.

[28]  M. Mladejovsky,et al.  Artificial Vision for the Blind: Electrical Stimulation of Visual Cortex Offers Hope for a Functional Prosthesis , 1974, Science.

[29]  Wen H. Ko,et al.  Active electrodes for EEG and evoked potential , 1998, Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. Vol.20 Biomedical Engineering Towards the Year 2000 and Beyond (Cat. No.98CH36286).

[30]  F A Spelman,et al.  The past, present, and future of cochlear prostheses. , 1999, IEEE engineering in medicine and biology magazine : the quarterly magazine of the Engineering in Medicine & Biology Society.

[31]  David C. Martin,et al.  Neuronal cell loss accompanies the brain tissue response to chronically implanted silicon microelectrode arrays , 2005, Experimental Neurology.

[32]  K. Najafi,et al.  A fully-integrated mixed-signal neural processing module for implantable multi-channel cortical recording , 2006, 2006 IEEE Biomedical Circuits and Systems Conference.

[33]  S. Shamma,et al.  A tantalum-on-sapphire microelectrode array , 1979, IEEE Transactions on Electron Devices.

[34]  Ilker Yaylali,et al.  Interictal spike detection using the Walsh transform , 2004, IEEE Transactions on Biomedical Engineering.

[35]  Qing Bai,et al.  A high-yield microassembly structure for three-dimensional microelectrode arrays , 2000, IEEE Transactions on Biomedical Engineering.

[36]  K. Wise,et al.  A high-yield IC-compatible multichannel recording array , 1985, IEEE Transactions on Electron Devices.

[37]  Joel W. Burdick,et al.  Spike detection using the continuous wavelet transform , 2005, IEEE Transactions on Biomedical Engineering.

[38]  Kensall D. Wise,et al.  A Low-Capacitance Multielectrode Probe for Use in Extracellular Neurophysiology , 1975, IEEE Transactions on Biomedical Engineering.

[39]  J. Wang,et al.  An integrated position-sensing system for a MEMS-based cochlear implant , 2005, IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest..

[40]  R. Fisher,et al.  Focally injected adenosine prevents seizures in the rat , 2004, Experimental Neurology.

[41]  K. Wise,et al.  A fully-integrated bandpass amplifier for extracellular neural recording , 2003, First International IEEE EMBS Conference on Neural Engineering, 2003. Conference Proceedings..

[42]  K. Wise,et al.  A shuttered probe with in-line flowmeters for chronic in-vivo drug delivery , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[43]  K. Wise,et al.  A low-profile three-dimensional neural stimulating array with on-chip current generation , 2004, The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[44]  K. Wise,et al.  A microprobe with integrated amplifiers for neurophysiology , 1971 .

[45]  Eduardo Fernandez,et al.  High-resolution spatio-temporal mapping of visual pathways using multi-electrode arrays , 2001, Vision Research.

[46]  J. Weiland,et al.  Retinal prosthesis for the blind. , 2002, Survey of ophthalmology.

[47]  K.D. Wise,et al.  Neural Recording Front-End Designs for Fully Implantable Neuroscience Applications and Neural Prosthetic Microsystems , 2006, 2006 International Conference of the IEEE Engineering in Medicine and Biology Society.

[48]  K. Wise,et al.  An implantable multielectrode array with on-chip signal processing , 1986 .

[49]  K. Wise,et al.  A Parylene-Silicon Cochlear Electrode Array with Integrated Position Sensors , 2006, 2006 International Conference of the IEEE Engineering in Medicine and Biology Society.

[50]  K.D. Wise,et al.  A 32-Site 4-Channel High-Density Electrode Array for a Cochlear Prosthesis , 2006, IEEE Journal of Solid-State Circuits.

[51]  R. Laprade,et al.  Electrical properties of glass microelectrodes , 1968 .

[52]  Mingui Sun,et al.  The bi-directional spike detection in EEG using mathematical morphology and wavelet transform , 2002, 6th International Conference on Signal Processing, 2002..

[53]  K. Wise,et al.  A multichannel neural probe for selective chemical delivery at the cellular level , 1997, IEEE Transactions on Biomedical Engineering.

[54]  Luke P. Lee,et al.  Implantable multichannel electrode array based on SOI technology , 2003 .

[55]  J. Hetke,et al.  Surface modification of neural recording electrodes with conducting polymer/biomolecule blends. , 2001, Journal of biomedical materials research.

[56]  G. Brindley,et al.  The sensations produced by electrical stimulation of the visual cortex , 1968, The Journal of physiology.

[57]  R A Normann,et al.  The Utah intracortical Electrode Array: a recording structure for potential brain-computer interfaces. , 1997, Electroencephalography and clinical neurophysiology.

[58]  Justin C. Williams,et al.  Flexible polyimide-based intracortical electrode arrays with bioactive capability , 2001, IEEE Transactions on Biomedical Engineering.

[59]  D. A. Huntington,et al.  ELECTRICAL STIMULATION OF ACOUSTICAL NERVE AND INFERIOR COLLICULUS. , 1964, Archives of otolaryngology.

[60]  K. Wise,et al.  A Drug-Delivery Probe with an In-Line Flowmeter Based on Trench Refill and Chemical Mechanical Polishing Techniques , 2007, 2007 IEEE Sensors.

[61]  J. Hetke,et al.  Strength characterization of silicon microprobes in neurophysiological tissues , 1990, IEEE Transactions on Biomedical Engineering.

[62]  R.R. Harrison,et al.  A Low-Power Integrated Circuit for a Wireless 100-Electrode Neural Recording System , 2006, IEEE Journal of Solid-State Circuits.

[63]  L. Wood,et al.  From the Authors , 2003, European Respiratory Journal.

[64]  H. K. Charles,et al.  Multisite microprobes for neural recordings , 1991, IEEE Transactions on Biomedical Engineering.

[65]  J. Chen.  A Multichannel Neural Probe for Selective Chemical Delivery at the Cellular Level , 1997 .

[66]  Sangwoo Lee,et al.  A 32-Site 4-Channel Cochlear Electrode Array , 2006, 2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers.

[67]  R. R. Harrison,et al.  A low-power low-noise CMOS amplifier for neural recording applications , 2003, IEEE J. Solid State Circuits.

[68]  M.S. Humayun,et al.  A biomimetic retinal stimulating array , 2005, IEEE Engineering in Medicine and Biology Magazine.

[69]  K. Wise,et al.  A 64-site multishank CMOS low-profile neural stimulating probe , 1996, IEEE J. Solid State Circuits.

[70]  J. McNames,et al.  Action potential detection with automatic template matching , 2004, The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[71]  K. Wise,et al.  An implantable CMOS circuit interface for multiplexed microelectrode recording arrays , 1992 .

[72]  D.M. Taylor,et al.  Information conveyed through brain-control: cursor versus robot , 2003, IEEE Transactions on Neural Systems and Rehabilitation Engineering.

[73]  K. Wise,et al.  A Low-Profile Three-Dimensional Silicon/Parylene Stimulating Electrode Array for Neural Prosthesis Applications , 2005, 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference.

[74]  Andrew B Schwartz,et al.  Cortical neural prosthetics. , 2004, Annual review of neuroscience.

[75]  O. Prohaska,et al.  Thin-Film Multiple Electrode Probes: Possibilities and Limitations , 1986, IEEE Transactions on Biomedical Engineering.

[76]  Qing Bai,et al.  Single-unit neural recording with active microelectrode arrays , 2001, IEEE Transactions on Biomedical Engineering.

[77]  M. Nicolelis,et al.  Reconstructing the Engram: Simultaneous, Multisite, Many Single Neuron Recordings , 1997, Neuron.

[78]  G. E. Perlin,et al.  The effect of the substrate on the extracellular neural activity recorded micromachined silicon microprobes , 2004, The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society.

[79]  K. Wise,et al.  A planar IrO multichannel stimulating electrode for use in neural prostheses , 1990 .

[80]  M. Verzeano,et al.  Neuronal Activity in Cortical and Thalamic Networks : A study with multiple microelectrodes , 1960 .

[81]  Khalil Najafi,et al.  Flexible miniature ribbon cables for long-term connection to implantable sensors , 1990 .

[82]  A. Benabid,et al.  Electrical stimulation of the subthalamic nucleus in advanced Parkinson's disease. , 1998, The New England journal of medicine.