论文信息 - Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering - 字舞流文

Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering

L. Yate | J. Caicedo | J. Muñoz-Saldaña | G. Zambrano | P. Prieto | F. Espinoza-beltrán | A. Macías