Recent Developments in Polymer MEMS

Polymer materials, including elastomers, plastics and fibers, are being actively used for MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost, mechanical properties, and ease of processing. In addition, polymers are being investigated for displays, memory, and circuitry. However, the incorporation of polymers for structural or functional purposes in MEMS systems raises new issues and challenges. This article provides a comprehensive review of the recent state of the art of polymer based MEMS—including materials, fabrication processes, and representative devices, including microfluidic valves and tactile sensors. Frequently used materials are reviewed, including polydimethylsiloxane (PDMS), parylene, nanocomposite elastomers, and SU‐8 epoxy.

[1]  A. Bueche.  Filler reinforcement of silicone rubber , 1957 .

[2]  K. Bean,et al.  Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.

[3]  Hitoshi Kawaguchi,et al.  Chemical Etching Characteristics of ( 001 ) InP , 1981 .

[4]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[5]  R. Howe,et al.  Polycrystalline Silicon Micromechanical Beams , 1983 .

[6]  William D. Callister,et al.  Materials Science and Engineering: An Introduction , 1985 .

[7]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[8]  Yu-Chong Tai,et al.  Surface micromachined mechanisms and micromotors , 1991 .

[9]  William C. Tang,et al.  Electrostatic Comb Drive Levitation And Control Method , 1992 .

[10]  D. J. Harrison,et al.  Planar chips technology for miniaturization and integration of separation techniques into monitoring systems. Capillary electrophoresis on a chip , 1992 .

[11]  N. C. MacDonald,et al.  Fabrication of submicron high-aspect-ratio GaAs actuators , 1993 .

[12]  Weng Poo Kang,et al.  Polycrystalline diamond pressure sensor , 1995 .

[13]  Kiichi Tsuchiya,et al.  A Thermal-Expansion-Type Microactuator with Paraffin as the Expansive Material (Basic Performance of a Prototype Linear Actuator) , 1997 .

[14]  D. J. Harrison,et al.  Microchip-based capillary electrophoresis for immunoassays: analysis of monoclonal antibodies and theophylline. , 1997, Analytical chemistry.

[15]  M. Despont,et al.  SU-8: a low-cost negative resist for MEMS , 1997 .

[16]  G. Whitesides,et al.  Fabrication of microstructures using shrinkable polystyrene films , 1998 .

[17]  G. Kovacs.  Micromachined Transducers Sourcebook , 1998 .

[18]  H. Fujita,et al.  Microactuators and micromachines , 1998, Proc. IEEE.

[19]  R. Howe,et al.  Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines , 1998 .

[20]  Mehran Mehregany,et al.  Silicon carbide MEMS for harsh environments , 1998, Proc. IEEE.

[21]  G. Whitesides,et al.  Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.

[22]  Brian N. Johnson,et al.  An integrated nanoliter DNA analysis device. , 1998, Science.

[23]  K. Oh,et al.  Flip-chip packaging using micromachined conductive polymer bumps and alignment pedestals for MOEMS , 1999 .

[24]  Elisabeth Smela,et al.  Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates , 1999 .

[25]  Chong H. Ahn,et al.  A new flip-chip bonding technique using micromachined conductive polymer bumps , 1999, ECTC 1999.

[26]  M. Manohara,et al.  Transfer by direct photo etching of poly(vinylidene flouride) using X-rays , 1999 .

[27]  Y. Tai,et al.  Design, fabrication, and testing of micromachined silicone rubber membrane valves , 1999 .

[28]  B. J. Kane,et al.  A traction stress sensor array for use in high-resolution robotic tactile imaging , 2000, Journal of Microelectromechanical Systems.

[29]  Forrest,et al.  Micropatterning of organic electronic devices by cold-welding , 2000, Science.

[30]  S. Senturia.  Microsystem Design , 2000 .

[31]  D. Beebe,et al.  Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer , 2000, Journal of Microelectromechanical Systems.

[32]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[33]  Robin H. Liu,et al.  Functional hydrogel structures for autonomous flow control inside microfluidic channels , 2000, Nature.

[34]  E. Smela,et al.  Microfabricating conjugated polymer actuators. , 2000, Science.

[35]  E. Makino,et al.  Micromachining of diamond film for MEMS applications , 2000, Journal of Microelectromechanical Systems.

[36]  D. Armani,et al.  Microfabrication technology for polycaprolactone, a biodegradable polymer , 2000 .

[37]  T. Chung,et al.  A new organic modifier for anti-stiction , 2001 .

[38]  C. Brabec,et al.  Plastic Solar Cells , 2001 .

[39]  Ren-Haw Chen,et al.  Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique , 2001 .

[40]  M. Bélanger,et al.  Hemocompatibility, biocompatibility, inflammatory and in vivo studies of primary reference materials low-density polyethylene and polydimethylsiloxane: a review. , 2001, Journal of biomedical materials research.

[41]  William N. Sharpe,et al.  Effect of specimen size on Young's modulus and fracture strength of polysilicon , 2001 .

[42]  Chang Liu,et al.  Micro magnetic silicone elastomer membrane actuator , 2001 .

[43]  M. Fonseca,et al.  Wireless micromachined ceramic pressure sensor for high-temperature applications , 2002 .

[44]  Y. Tai,et al.  BrF3 dry release technology for large freestanding parylene microstructures and electrostatic actuators , 2002 .

[45]  Liwei Lin,et al.  Microplastic embossing process: experimental and theoretical characterizations ☆ , 2002 .

[46]  Ryutaro Maeda,et al.  A polydimethylsiloxane (PDMS) deformable diffraction grating for monitoring of local pressure in microfluidic devices , 2002 .

[47]  G. Wallace,et al.  Use of Ionic Liquids for π-Conjugated Polymer Electrochemical Devices , 2002, Science.

[48]  C. Mastrangelo,et al.  Surface micromachined paraffin-actuated microvalve , 2002 .

[49]  M. Madou.  Fundamentals of microfabrication : the science of miniaturization , 2002 .

[50]  M. Roukes,et al.  Nanoelectromechanical systems: Nanodevice motion at microwave frequencies , 2003, Nature.

[51]  Y. Tai,et al.  Photo-patternable gelatin as protection layers in low-temperature surface micromachinings , 2003 .

[52]  Meng-Nian Niu,et al.  Piezoelectric bimorph microphone built on micromachined parylene diaphragm , 2003 .

[53]  Yuandong Gu,et al.  A hydrogel-actuated environmentally sensitive microvalve for active flow control , 2003 .

[54]  K. R. Williams,et al.  Etch rates for micromachining processing-Part II , 2003 .

[55]  J. Sweedler,et al.  Gateable nanofluidic interconnects for multilayered microfluidic separation systems. , 2003, Analytical chemistry.

[56]  J. Engel,et al.  Liquid crystal polymer (LCP) for MEMS: processes and applications , 2003 .

[57]  H. Sirringhaus,et al.  Self-Aligned, Vertical-Channel, Polymer Field-Effect Transistors , 2003, Science.

[58]  Jörg Bagdahn,et al.  Fatigue testing of polysilicon––a review , 2004 .

[59]  Xiang Zhang,et al.  Diffusion-limited photopolymerization in scanning micro-stereolithography , 2004 .

[60]  K. Gall,et al.  Shape-memory polymers for microelectromechanical systems , 2004, Journal of Microelectromechanical Systems.

[61]  M. Kothare,et al.  A microreactor for hydrogen production in micro fuel cell applications , 2004, Journal of Microelectromechanical Systems.

[62]  Yoseph Bar-Cohen.  Robotics: electric flex , 2004 .

[63]  E. Guizzo.  Organic memory gains momentum , 2004, IEEE Spectrum.

[64]  Chang Liu,et al.  A method for precision patterning of silicone elastomer and its applications , 2004, Journal of Microelectromechanical Systems.

[65]  K. Najafi,et al.  The fabrication of all-diamond packaging panels with built-in interconnects for wireless integrated microsystems , 2004, Journal of microelectromechanical systems.

[66]  Vincent Studer,et al.  A nanoliter-scale nucleic acid processor with parallel architecture , 2004, Nature Biotechnology.

[67]  E. S. Kim,et al.  Fabrication of MEMS ZnO dome-shaped-diaphragm transducers for high-frequency ultrasonic imaging , 2004, IEEE Ultrasonics Symposium, 2004.

[68]  Chang Liu,et al.  A mould-and-transfer technology for fabricating scanning probe microscopy probes , 2004 .

[69]  Chang Liu,et al.  Parylene surface-micromachined membranes for sensor applications , 2004, Journal of Microelectromechanical Systems.

[70]  Y. Bar-Cohen.  Turning heads , 2004, IEEE Spectrum.

[71]  J. El-Ali,et al.  Simulation and experimental validation of a SU-8 based PCR thermocycler chip with integrated heaters and temperature sensor , 2004 .

[72]  N. Chronis,et al.  Electrothermally activated SU-8 microgripper for single cell manipulation in solution , 2005, Journal of Microelectromechanical Systems.

[73]  T. Cui,et al.  Polymer-based wide-bandwidth and high-sensitivity micromachined electron tunneling accelerometers using hot embossing , 2005 .

[74]  J. Engel,et al.  Polymer micromachined multimodal tactile sensors , 2005 .

[75]  John A. Rogers,et al.  Bendable single crystal silicon thin film transistors formed by printing on plastic substrates , 2005 .

[76]  Douglas L. Jones,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Texture Classification Using a Polymer-based Mems Tactile Sensor , 2022 .

[77]  John A Rogers,et al.  Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials , 2006, Science.

[78]  Chang Liu,et al.  Foundations of MEMS , 2006 .

[79]  Liangbing Hu,et al.  Organic solar cells with carbon nanotube network electrodes , 2006 .

[80]  R. Delille,et al.  Benchtop Polymer MEMS , 2006, Journal of Microelectromechanical Systems.

[81]  Yong-Kyu Yoon,et al.  Multidirectional UV Lithography for Complex 3-D MEMS Structures , 2006, Journal of Microelectromechanical Systems.

[82]  Chad A Mirkin,et al.  A bio-barcode assay for on-chip attomolar-sensitivity protein detection. , 2006, Lab on a chip.

[83]  Jaehoon Chung,et al.  Programmable reconfigurable self-assembly: parallel heterogeneous integration of chip-scale components on planar and nonplanar surfaces , 2006, Journal of Microelectromechanical Systems.

[84]  S. Konishi,et al.  All PDMS pneumatic microfinger with bidirectional motion and its application , 2006, Journal of Microelectromechanical Systems.

[85]  Effect of temperature on in-use stiction of cantilever beams coated with perfluorinated alkysiloxane monolayers , 2006, Journal of Microelectromechanical Systems.

[86]  Yu-Chong Tai,et al.  Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate. , 2006, Lab on a chip.

[87]  F. Prinz,et al.  Microfabrication Technology of Biodegradable Polymers for Interconnecting Microstructures , 2006, Journal of Microelectromechanical Systems.

[88]  J. Chen,et al.  Polyurethane rubber all-polymer artificial hair cell sensor , 2006, Journal of Microelectromechanical Systems.

[89]  K. Harris,et al.  Physical Properties of Anisotropically Swelling Hydrogen-Bonded Liquid Crystal Polymer Actuators , 2007, Journal of Microelectromechanical Systems.

[90]  G. Stemme,et al.  A Thermally Responsive PDMS Composite and Its Microfluidic Applications , 2007, Journal of Microelectromechanical Systems.

[91]  V. Chu,et al.  Conductive Blended Polymer MEMS Microresonators , 2007, Journal of Microelectromechanical Systems.

[92]  Jung-Hwan Park,et al.  Tapered Conical Polymer Microneedles Fabricated Using an Integrated Lens Technique for Transdermal Drug Delivery , 2007, IEEE Transactions on Biomedical Engineering.

[93]  Y. Tai,et al.  Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation , 2007, Journal of Microelectromechanical Systems.

[94]  R. Rosenfeld.  Nature , 2009, Otolaryngology--head and neck surgery : official journal of American Academy of Otolaryngology-Head and Neck Surgery.