0.15 mu m GaAs MESFETs applied to ultrahigh-speed static frequency dividers
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0.15 mu m gate-length FETs fabricated by SAINT using photo lithography are applied to ultrahigh-speed static frequency dividers. Short channel effects are suppressed by a buried p-layer and shallow active layers formed by low energy implantations and rapid thermal annealing. The maximum cutoff frequency of the 0.15 mu m gate-length FETs was 80.6 GHz. The maximum toggle frequency of the LSCFL one-quarter frequency divider is 26.8 GHz with a power dissipation of 263 mW.
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