Advanced applications in microphotonics using proton beam writing

Proton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications.

[1]  Andrew A. Bettiol,et al.  Fabrication of buried channel waveguides in photosensitive glass using proton beam writing , 2006 .

[2]  A. Roberts,et al.  Ion beam energy attenuation for fabrication of buried, variable-depth, optical waveguides , 2000 .

[3]  M. L. von Bibra,et al.  Fabrication of long-period fiber gratings by use of focused ion-beam irradiation. , 2001, Optics letters.

[4]  Andrew A. Bettiol,et al.  Proton beam writing of low-loss polymer optical waveguides , 2003 .

[5]  H. Giessen,et al.  Three-dimensional metamaterials at optical frequencies , 2008, 2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science.

[6]  Graham T. Reed,et al.  Freestanding waveguides in silicon , 2007 .

[7]  J. Hajnal,et al.  Sub-wavelength imaging at radio frequency , 2006 .

[8]  Brant C. Gibson,et al.  Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond , 2005 .

[9]  D. N. Rao,et al.  Fabrication and characterization of microcavity lasers in rhodamine B doped SU8 using high energy proton beam , 2007 .

[10]  Ann Roberts,et al.  Fabrication of buried channel waveguides in fused silica using focused MeV proton beam irradiation , 1996 .

[11]  G Z Mashanovich,et al.  Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation. , 2009, Optics letters.

[12]  Andrew A. Bettiol,et al.  Three-dimensional microfabrication in bulk silicon using high-energy protons , 2004 .

[13]  Andrew A. Bettiol,et al.  Three-dimensional micromachining of silicon using a nuclear microprobe , 2004 .

[14]  A. Bettiol,et al.  Proton-beam writing of poly-methylmethacrylate buried channel waveguides , 2006, Journal of Lightwave Technology.

[15]  K. Imai.  A new dielectric isolation method using porous silicon , 1981 .

[16]  M. Breese,et al.  Porous silicon Bragg reflectors with sub-micrometer lateral dimensions. , 2007, Optics express.

[17]  Ke Liu,et al.  Erbium-doped waveguide amplifiers fabricated using focused proton beam writing , 2004 .

[18]  Andrew A. Bettiol,et al.  Fabrication of integrated channel waveguides in polydimethylsiloxane (PDMS) using proton beam writing (PBW): applications for fluorescence detection in microfluidic channels , 2008, SPIE MOEMS-MEMS.

[19]  Andrew A. Bettiol,et al.  Multiple-spot optical tweezers created with microlens arrays fabricated by proton beam writing , 2004 .

[20]  D. Shepherd,et al.  Room-temperature continuous-wave operation of Ti:sapphire buried channel-waveguide lasers fabricated via proton implantation. , 2006, Optics letters.

[21]  J. Pendry,et al.  Magnetism from conductors and enhanced nonlinear phenomena , 1999 .

[22]  A. Bettiol,et al.  Embedded photonic structures fabricated in photosensitive glass using proton beam writing , 2007 .

[23]  M. Breese,et al.  Three-dimensional control of optical waveguide fabrication in silicon. , 2008, Optics express.

[24]  S. Lipson,et al.  Production of radially and azimuthally polarized polychromatic beams. , 2006, Optics letters.

[25]  Andrew A. Bettiol,et al.  A progress review of proton beam writing applications in microphotonics , 2005 .

[26]  David R. Smith,et al.  Metamaterial Electromagnetic Cloak at Microwave Frequencies , 2006, Science.

[27]  Jianqiang Gu,et al.  Increased frequency shifts in high aspect ratio terahertz split ring resonators , 2009 .

[28]  R. Shelby,et al.  Experimental Verification of a Negative Index of Refraction , 2001, Science.

[29]  P. D. Townsend,et al.  Optical effects of ion implantation , 1987 .