As a kind of fluid delivering device, micropumps usually employ flexible structure such as flexible membrane to force fluid flowing. It is necessary to predict the motion of flexible structure so as to control the micropump performance. In this paper, the principle of micropump using an electrostatic actuator has been introduced. According to the thin plate elastic theory, the bending motion of electrostatic-flexible membrane has been modelled. Based on Rayleith-Ritz method, the solution for harmonic vibration of flexible membrane has been derived. A calculation example of resonance frequency of silicon electrostatic actuating membrane has been carried out. And the result calculated from such model agree with that by means of finite element method. It indicats that the analyzation model is appropriate and applicable. All analyzations provide theoretical foundation for the controlling of MEMS actuators.
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