A six-phase multilevel inverter for MEMS electrostatic induction micromotors

The construction of miniaturized rotating electric machines through microfabrication techniques is becoming a reality. Applications of such micromotors include miniaturized pumps, compressors, fans, coolers, and turbogenerators. However, the characteristics of these devices make the design of power electronics for them challenging. These characteristics include high-voltage and high frequency operation, tightly constrained operating waveforms and timing, and capacitive input impedances. This paper explores the design of power electronics for microfabricated electrostatic induction machines. We describe the structure and operation of these machines, and establish the operating requirements of power converters for them. We provide a comparison of inverter topologies for this application, and propose an appropriate architecture. The design and experimental evaluation of a prototype six-phase, five-level inverter for this application is presented. The inverter operates at frequencies up to 2 MHz and at voltages up to 300 V, and meets the stringent waveform and timing constraints posed by this application.

[1]  Fang Zheng Peng,et al.  A generalized multilevel inverter topology with self voltage balancing , 2000, Conference Record of the 2000 IEEE Industry Applications Conference. Thirty-Fifth IAS Annual Meeting and World Conference on Industrial Applications of Electrical Energy (Cat. No.00CH37129).

[2]  Miguel J. Prieto,et al.  Design and analysis of thick-film integrated inductors for power converters , 2002 .

[3]  Stephen F. Bart,et al.  Design considerations for micromachined electric actuators , 1988 .

[4]  No Sokal,et al.  CLASS-E - NEW CLASS OF HIGH-EFFICIENCY TUNED SINGLE-ENDED SWITCHING POWER AMPLIFIERS , 1975 .

[5]  J. Lang,et al.  An electrostatic induction micromotor supported on gas-lubricated bearings , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[6]  Fang Zheng Peng,et al.  Multilevel converters-a new breed of power converters , 1995, IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting.

[7]  R. Steigerwald,et al.  A comparison of half-bridge resonant converter topologies , 1987, 1987 IEEE Applied Power Electronics conference and Exposition.

[8]  Seth R. Sanders,et al.  Fundamental limits on energy transfer and circuit considerations for piezoelectric transformers , 1998 .

[9]  Fang Zheng Peng,et al.  A multilevel voltage-source inverter with separate DC sources for static VAr generation , 1995, IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting.

[10]  J. D. van Wyk,et al.  Electromagnetic energy propagation in power electronic converters: toward future electromagnetic integration , 2001, Proc. IEEE.