论文信息 - Heteroepitaxial growth of β-Ga2O3 thin films on c-plane sapphire substrates with β-(AlxGa1-x)2O3 intermediate buffer layer by mist-CVD method - 字舞流文

Heteroepitaxial growth of β-Ga2O3 thin films on c-plane sapphire substrates with β-(AlxGa1-x)2O3 intermediate buffer layer by mist-CVD method

Y. Hao | Q. Feng | Chunfu Zhang | Jincheng Zhang | Weidong Zhu | Dazheng Chen | Shengrui Xu | Zhe Li | Yu Xu | Yaolin Cheng