Evaluation of an Electrostatic Film Motor Driven by Two-Four-Phase AC Voltage and Electrostatic Induction

This paper describes a voltage-induction type electrostatic film motor that operates by feeding electric power to the slider by electrostatic induction. In electrostatic film motors, feeding power to slider is important for better output capability and positioning performance. However, the power feeding using electric cables sometimes cause mechanical disturbance to the motor motions. In the new electrostatic motor, the power to the slider is fed by electrostatic induction, thus removing electric cables that can cause mechanical disturbances. The proposed motor has a two-phase electrode in the slider and a four-phase electrode in the stator. In addition, both stator and slider have the induction electrodes so that electric power is transferred to the slider through the induction electrodes. The paper first analyzes the thrust force characteristics of the proposed driving-electrode configuration, and then analyzes the characteristics of voltage induction, both based on capacitance-network analysis. The analyzed result is verified by experiments that showed good agreements with the provided analysis

[1]  S. Egawa,et al.  Film actuators: Planar, electrostatic surface-drive actuators , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[2]  Dominiek Reynaerts,et al.  Design aspects of shape memory actuators , 1998 .

[3]  Akio Yamamoto,et al.  Robotic arm using flexible electrostatic film actuators , 2003, 2003 IEEE International Symposium on Industrial Electronics ( Cat. No.03TH8692).

[4]  Toshiki Niino,et al.  High-power and high-efficiency electrostatic actuator , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  T. Niino,et al.  Development of an electrostatic actuator exceeding 10 N propulsive force , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[6]  Takahiro Ema,et al.  Recent Progress in Electron-Beam Cell Projection Technology , 1996 .

[7]  Toshiki Niino,et al.  Modeling and identification of an electrostatic motor , 2006 .

[8]  N. Delson,et al.  Modeling and implementation of McKibben actuators for a hopping robot , 2005, ICAR '05. Proceedings., 12th International Conference on Advanced Robotics, 2005..

[9]  Akio Yamamoto,et al.  A 2-DOF electrostatic sheet conveyer using wire mesh for desktop automation , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..

[10]  Etienne Burdet,et al.  An MR compatible robot technology , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[11]  Y. Perriard,et al.  fMRI compatible haptic interface actuated with traveling wave ultrasonic motor , 2005, Fourtieth IAS Annual Meeting. Conference Record of the 2005 Industry Applications Conference, 2005..

[12]  Ron Kikinis,et al.  MR Compatibility of Mechatronic Devices: Design Criteria , 1999, MICCAI.