Design, simulation and fabrication of MEMS based dielectrophoretic separator for bio-particles

There is recently a great interest in developing integrated biological analysis systems that can perform general biochemistry and biological analysis. We present a design for continuous separation structure based on dielectrophoretic forces. The particles with varying electrical properties move continuously to the different location across the channel as they flow, due to the different DEP force, thus continuously separate at the outlet. In this paper, simulation results for the optimization of dielectrophoretic device is presented and discussed in detail. Simulation results for cell separation is carried out in a circular channel driven by AC field and the process model with fabricated device. Compared with the previously reported dielectrophoretic separation devices, this structure achieves continuous separation and also minimizes dead volumes.

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