论文信息 - Displacement loss of flexure-hinged amplifying mechanism

Displacement loss of flexure-hinged amplifying mechanism

The amplifying factor is utilized to study displacement loss of flexure-hinged amplifying mechanism in the paper. Firstly, the amplifying factors of three typical amplifying mechanisms are theoretically calculated. Then, the actual amplifying factor of lever-type amplifying mechanism, which is widely used, is detailedly simulated by using parametric language APDL in finite element software ANSYS. The relationships between the amplifying factor and the basic parameters and layouts of flexure hinge are analyzed. The analytical results demonstrate the ratio of the cutting radius to the minimum thickness and layouts of flexure hinges have strong effect on displacement loss of flexure-hinged amplifying mechanism.

Zhou Qinghua | Shen Jianying | Z. Qinghua | Shen Jianying

[1] Wei Xu,et al. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations , 1996 .

[2] Ying-Shieh Kung,et al. Optimal design of a micro-positioning Scott-Russell mechanism by Taguchi method , 2006 .

[3] Kee S. Moon,et al. Optimal design of a flexure hinge based XYφ wafer stage , 1997 .

[4] Theodore V. Vorburger,et al. Long‐range scanning for scanning tunneling microscopy , 1992 .

[5] Zhaoying Zhou,et al. Design calculations for flexure hinges , 2002 .

[6] Seung-Woo Kim,et al. An ultraprecision stage for alignment of wafers in advanced microlithography , 1997 .

[7] Toru Tojo,et al. Piezoelectrically driven XYθ table for submicron lithography systems , 1989 .