Design and Implementation of Thin-filmed Piezoelectric Pressure Sensor

this paper offers an analytical modeling of thin-filmed, multi-layer piezoelectric sensor. In this work, analysis and simulation of a thin plate pressure sensor is carried on using both mathematical models and finite element analyses. Experimental methods, in the form of full-field- of-view laser microscopy, are applied to show the internal structure of the fabricated pressure sensor and update the computational models. The combined approach of the two methods is used to determine the elastic modulus and the thickness of the diaphragm of the pressure sensor. MEMS pressure sensors are based on a piezoelectric capacitive thin diaphragm that is fabricated using standard Integrated Circuit (IC) procedures including anisotropic etching. During operation, the thin diaphragm of the sensor deflects under pressure loadings, which produces electrical outputs. Analytical simulation using COMSOL software and theoretical computations using equations will be offered in order to determine the parameters for optimal design setting.