Efficient, damage resistant LiNbO3 acousto‐optic waveguide deflector

An efficient, damage resistant, guided wave deflector in LiNbO3 has been fabricated by a combination of titanium diffusion, proton exchange in benzoic acid with lithium benzoate, and post‐annealing processes. The stability of the waveguide has been confirmed using x‐ray rocking curves. The insertion loss of interdigital transducer and the diffraction efficiency were found to depend on the wave number of OH absorption produced by proton exchange.