Accuracy Improvement in Tool-Based Micromachining

The need for micro part is growing drastically because of technology advancement in biomedical, semiconductor, and aerospace industries, etc. Tool-based micromachining is the advanced approach for the production of parts for enhanced functionality with significant size reduction. Part accuracy is dealt with the degree at which the part approximates the true geometrical shape and size. In this chapter, factors that influence the part geometrical and dimensional accuracy in tool-based micromachining are presented. It is divided into six major elements: (a) cutting tool, (b) work material, (c) environment, (d) cutting phenomenon, (e) process parameters, and (f) machine tool. In this study, tool-oriented conventional micromachining processes are considered. The individual sub factors are represented by a fishbone diagram. The influence of parameters and their cause are described with the published literature, and the possible ways for part accuracy improvement in tool-based micromachining are presented.

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