Organometallic Chemical Vapor Deposition of ZrF4-Based Fluoride Glasses

By organometallic chemical vapor deposition (OMCVD), fluoride glasses in a ZrF4-BaF2 binary system are successfully synthesized. β-Diketone chelates of Zr and Ba as starting materials can be volatilized and completely fluorinated with HF gas into ZrF4-BaF2 compounds. 65 mol%ZrF4-35 mol%BaF2 powder synthesized by OMCVD is identified as homogeneous glass by X-ray diffraction (XRD) and differential scanning calorimetry (DSC). By this method, ZrF4 is also obtained in an amorphous state. The OMCVD is available for preparation of fluoride glass, which is promising for optical fiber.