论文信息 - Effects of N 2 Plasma Pretreatment on the SiN Passivation of AlGaN / GaN HEMT - 字舞流文

Effects of N 2 Plasma Pretreatment on the SiN Passivation of AlGaN / GaN HEMT

F. Calle | A. Braña | J. Miguel-Sánchez | E. Muñoz | R. Cuerdo | A. Jiménez | F. Gonzalez-Posada | M. Romero