Formation of p-type ZnO film on InP substrate by phosphor doping

Abstract ZnO thin film was initially deposited on InP substrate by radio frequency (rf) magnetron sputtering and the diffusion process was performed using the closed ampoule technique where Zn3P2 was used as the dopant source. To verify the junction formation of ZnO thin films, the electrical properties were measured, and the effects of Zn3P2 diffusion on ZnO thin films were investigated. It is observed that the electrical property of the film is changed from n-type to p-type by dopant diffusion effect. Based on the results, it is confirmed that ZnO thin films can be a potential candidate for ultraviolet (UV) optical devices.

[1]  Bixia Lin,et al.  Green luminescent center in undoped zinc oxide films deposited on silicon substrates , 2001 .

[2]  Ilgu Yun,et al.  Zinc diffusion process investigation of InP-based test structures for high-speed avalanche photodiode fabrication , 2000 .

[3]  David C. Look,et al.  Synthesis of p-type ZnO films , 2000 .

[4]  Hui Zhao,et al.  The photo- and electro-luminescence properties of ZnO:Zn thin film , 2000 .

[5]  Toru Aoki,et al.  ZnO diode fabricated by excimer-laser doping , 2000 .

[6]  Y. Ryu,et al.  Fabrication of homostructural ZnO p-n junctions , 2000 .

[7]  T. Kawai,et al.  Fabrication and Optoelectronic Properties of a Transparent ZnO Homostructural Light-Emitting Diode , 2001 .

[8]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[9]  Andrew G. Glen,et al.  APPL , 2001 .

[10]  Peter Blood,et al.  The Electrical Characterization of Semiconductors: Majority Carriers and Electron States , 1992 .

[11]  J. Myoung,et al.  Effects of Thickness Variation on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition , 2002 .

[12]  Tokihiro Nishihara,et al.  Control of preferred orientation for ZnOx films: control of self-texture , 1993 .

[13]  D. C. Reynolds,et al.  Similarities in the bandedge and deep-centre photoluminescence mechanisms of ZnO and GaN , 1997 .

[14]  Tomoji Kawai,et al.  p-Type Electrical Conduction in ZnO Thin Films by Ga and N Codoping , 1999 .

[15]  Masashi Kawasaki,et al.  Ultraviolet spontaneous and stimulated emissions from ZnO microcrystallite thin films at room temperature , 1997 .

[16]  Shengbai Zhang,et al.  The thermodynamics of codoping: how does it work? , 2001 .