论文信息 - Effect of N2 plasma treatments on dry etch damage in n- and p-type GaN - 字舞流文

Effect of N2 plasma treatments on dry etch damage in n- and p-type GaN

A. P. Zhang | F. Ren | S. Pearton | M. Overberg | C. Abernathy | K. Mackenzie | K. Lee | B. Luo | D. G. Kent | Y. Nakagawa