초대형 TFT-LCD Bake Chamber의 FEM을 이용한 구조해석

Display engineers and researchers want to mechanical characteristics of TFT-LCD Bake Chamber due to the number of expensive, time-consuming measurements, and the geometric complexity. The objectives of this study are to investigate mechanical characteristics of TFT-LCD Bake Chamber under the loading and the heat. The structure analysis have been carried out a series of computer simulation using FEM.