The effect of patterns on thermal stress during rapid thermal processing of silicon wafers
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[1] E. Palik. Handbook of Optical Constants of Solids , 1997 .
[2] Klavs F. Jensen,et al. A Systematic Approach to Simulating Rapid Thermal Processing Systems , 1996 .
[3] Klavs F. Jensen,et al. The Effect of Multilayer Patterns on Temperature Uniformity during Rapid Thermal Processing , 1996 .
[4] J. Buller,et al. Manufacturing issues related to RTP induced overlay errors in a global alignment stepper technology , 1996 .
[5] A. Ditali,et al. Effects of wafer bow and warpage on the integrity of thin gate oxides , 1994 .
[6] Karen Maex,et al. Influence of temperature and backside roughness on the emissivity of Si wafers during rapid thermal processing , 1992 .
[7] Daniel Boley,et al. A simple method to determine the stability and margin of stability of 2-D recursive filters , 1992 .
[8] S. M. Hu,et al. Stress‐related problems in silicon technology , 1991 .
[9] M. M. Moslehi,et al. Process uniformity and slip dislocation patterns in linearly ramped-temperature transient rapid thermal processing of silicon , 1989 .
[10] William D. Nix,et al. Mechanical properties of thin films , 1989 .
[11] H. A. Lord,et al. Thermal And Stress Analysis Of Semiconductor Wafers In A Rapid Thermal Processing Oven , 1988, Other Conferences.
[12] W. Rehwald,et al. Thermoplastic Deformation of Silicon Wafers , 1986 .
[13] E. Hearn,et al. Film‐Induced Stress Model , 1986 .
[14] William H. Bowes,et al. Mechanics of Engineering Materials , 1985 .
[15] G. G. Bentini,et al. Defects introduced in silicon wafers during rapid isothermal annealing: Thermoelastic and thermoplastic effects , 1984 .
[16] W. Schröter,et al. Yield point and dislocation mobility in silicon and germanium , 1983 .
[17] H. Huff,et al. Plastic Deformation in Central Regions of Epitaxial Silicon Slices , 1971 .
[18] J. Patel,et al. Macroscopic Plastic Properties of Dislocation‐Free Germanium and Other Semiconductor Crystals. I. Yield Behavior , 1963 .
[19] J. H. Weiner,et al. Theory of Thermal Stresses , 1961 .
[20] J. Hebb. Pattern effects in rapid thermal processing , 1997 .
[21] M. Ohring. The Materials Science of Thin Films , 1991 .
[22] Karen Maex,et al. Impact of Patterned Layers on Temperature Non-Uniformity during Rapid Thermal Processing for VLSI-Applications , 1989 .
[23] P. Yeh,et al. Optical Waves in Layered Media , 1988 .