Characterisation of a pixel sensor in 0.20μm SOI technology for charged particle tracking

Abstract This paper presents the results of the characterisation of a pixel sensor manufactured in 0.2 μ m SOI technology integrated on a high-resistivity substrate, and featuring several pixel cell layouts for charge collection optimisation. The sensor is tested with short IR laser pulses, X-rays and 200 GeV pions. We report results on charge collection, particle detection efficiency and single point resolution.

[1]  A. Besson,et al.  Direct electron imaging in electron microscopy with monolithic active pixel sensors. , 2007, Ultramicroscopy.

[2]  J. Fontaine,et al.  Towards a 10μs, thin and high resolution pixelated CMOS sensor system for future vertex detectors , 2011 .

[3]  D. Bisello,et al.  Tracking and vertexing with a thin CMOS pixel beam telescope , 2008, 0805.1504.

[4]  Susumu Terada,et al.  Evaluation of OKI SOI technology , 2007 .

[5]  Dionisio Doering,et al.  Characterisation of a CMOS Active Pixel Sensor for use in the TEAM Microscope , 2010, 1006.2544.

[6]  Takashi Kohriki,et al.  R&D of a pixel sensor based on 0.15μm fully depleted SOI technology , 2007 .

[7]  J. Baudot,et al.  Performance study of a MegaPixel single photon position sensitive photodetector EBCMOS , 2009 .

[8]  Lindsay Glesener,et al.  Developments of SOI monolithic pixel detectors , 2010 .

[9]  Technology development for SOI monolithic pixel detectors , 2006 .

[10]  Andrzej Kociubiński,et al.  Monolithic silicon pixel detectors in SOI technology , 2005 .

[11]  P. Denes,et al.  A Rad-hard CMOS Active Pixel Sensor for Electron Microscopy , 2008, 0811.2833.

[12]  Stuart Kleinfelder,et al.  Active pixel sensor array as a detector for electron microscopy. , 2005, Ultramicroscopy.

[13]  H.S.Chen （陈和生）,et al.  Computing in High Energy and Nuclear Physics , 2001 .

[14]  F. Gaede.  Marlin and LCCD—Software tools for the ILC , 2006 .

[15]  R. Klanner,et al.  Charge collection in silicon strip detectors , 1983 .

[16]  D. Bisello,et al.  Monolithic pixel sensors in deep-submicron SOI technology with analog and digital pixels , 2008, 0811.4540.

[17]  F. Rademakers,et al.  ROOT — An object oriented data analysis framework , 1997 .

[18]  Claude Colledani,et al.  A monolithic active pixel sensor for charged particle tracking and imaging using standard VLSI CMOS technology , 2001 .

[19]  Krzysztof Kucharski,et al.  Full-size monolithic active pixel sensors in SOI technology—Design considerations, simulations and measurements results , 2006 .

[20]  D. Bisello,et al.  A DAQ system for pixel detectors R&D , 2009 .

[21]  G. Grzelak,et al.  Study of cluster shapes in a monolithic active pixel detector , 2009, 0903.3658.

[22]  Lindsay Glesener,et al.  A monolithic pixel sensor in 0.15 μm fully depleted SOI technology , 2007 .

[23]  H. A. Weakliem,et al.  Temperature dependence of the optical properties of silicon , 1979 .