The basic issues in design and fabrication of diamond-cutting tools for ultra-precision and nanometric machining

Single-crystal diamond is considered as the preferred tool material in ultra-precision and nanometric cutting operation. Due to the well known and exceptional difficulty in shaping, the fabrication of diamond-cutting tools requires special processing methods. As a highly efficient and cost-effective solution, the mechanical lapping process has been extensively applied in tool-making industry. And therefore in this paper, the key enabling technologies to design and fabricate the diamond-cutting tools for ultra-precision and nanometric machining are presented and reviewed. The paper covers the mechanical lapping process, including the lapping machine, lapping mechanism and micro-mechanical strengths of the diamond crystal, optimization of lapping parameters, tool design criterions, ultimate sharpness as well as the evaluation of edge quality.

[1]  John E. Field,et al.  Diamond polishing: the dependency of friction and wear on load and crystal orientation , 2000 .

[2]  J. Field,et al.  The polishing of diamond , 1997 .

[3]  Akira Kobayashi,et al.  Measuring the Very Small Cutting-Edge Radius for a Diamond Tool Using a New Kind of SEM Having Two Detectors , 1990 .

[4]  Tao Sun,et al.  The material removal mechanism in mechanical lapping of diamond cutting tools , 2005 .

[5]  Shoichi Shimada,et al.  Non-Destructive Strength Evaluation of Diamond for Ultra-Precision Cutting Tool , 1985 .

[6]  D. L. Decker,et al.  Preselection Of Diamond Single-Point Tools , 1984, Optics & Photonics.

[7]  K.H.W. Seah,et al.  Effect of crystallographic orientation on wear of diamond tools for nano-scale ductile cutting of silicon , 2004 .

[8]  Don A. Lucca,et al.  Effect of Tool Edge Geometry on Energy Dissipation in Ultraprecision Machining , 1993 .

[9]  Kui Liu,et al.  Nano-precision measurement of diamond tool edge radius for wafer fabrication , 2003 .

[10]  Kenjiro Uegami,et al.  Study on Lapping of Diamond Tool (2nd Report) , 1994 .

[11]  Toshimichi Moriwaki,et al.  Ultraprecision Metal Cutting — The Past, the Present and the Future , 1991 .

[12]  Kazuo Nakayama,et al.  Evaluation of cutting edge sharpness by transcribing the edge on thin wire. , 1989 .

[13]  S. Asai,et al.  Observations of chip producing behaviour in ultra-precision diamond machining and study on mirror-like surface generating mechanism , 1990 .

[14]  Satoshi Kiyono,et al.  Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor , 2006 .

[15]  Jan Haisma,et al.  Damage-free tribochemical polishing of diamond at room temperature: a finishing technology , 1992 .

[16]  William D. Brown,et al.  A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates , 1999 .

[17]  Yingxue Yao,et al.  Lapping of Single Crystal Diamond Tools , 2003 .

[18]  Tao Sun,et al.  Design criterion for crystal orientation of diamond cutting tool , 2009 .

[19]  O. Weis,et al.  Mechanochemical superpolishing of diamond using NaNO3 or KNO3 as oxidizing agents , 1995 .

[20]  William D. Brown,et al.  A comparison of mechanical lapping versus chemical-assisted mechanical polishing and planarization of chemical vapor deposited (CVD) diamond , 1999 .

[21]  M. Popov,et al.  Mechanical properties of different types of diamond , 1999 .

[22]  Tao Sun,et al.  The ultimate sharpness of single-crystal diamond cutting tools—Part I: Theoretical analyses and predictions , 2007 .

[23]  Kai Cheng,et al.  The ultimate sharpness of single-crystal diamond cutting tools—Part II: A novel efficient lapping process , 2007 .

[24]  Hiroaki Tanaka,et al.  Minimum thickness of cut in micromachining , 1992 .

[25]  Iwao Miyamoto,et al.  Ion beam machining of single-point diamond tools for nano-precision turning , 1990 .

[26]  Masahiro Higuchi,et al.  Scientific Screening of Raw Diamond for an Ultraprecision Cutting Tool with High Durability , 2006 .

[27]  Field,et al.  Theoretical strength and cleavage of diamond , 2000, Physical review letters.

[28]  J. E. Field,et al.  Strength, fracture and friction properties of diamond , 1996 .

[29]  Reinhart Job,et al.  Thermochemical beveling of CVD diamond films intended for precision cutting and measurement applications , 2002 .

[30]  K.H.W. Seah,et al.  Performance of single crystal diamond tools in ductile mode cutting of silicon , 2007 .

[31]  John E. Field,et al.  A wear mechanism map for the diamond polishing process , 2005 .

[32]  Yingxue Yao,et al.  The Optimum Crystal Plane of Natural Diamond Tool for Precision Machining , 1992 .

[33]  R. Berman,et al.  Physical properties of diamond , 1965 .

[34]  Tao Sun,et al.  Nano-precision diamond cutting tools achieved by mechanical lapping versus thermo-mechanical lapping , 2008 .

[35]  M. Seal,et al.  Scanning tunneling microscopy of polished diamond surfaces , 1992 .

[36]  Schubert Soãres.  Nanometer edge and surface imaging using optical scatter , 2003 .

[37]  Tao Sun,et al.  Measuring the nose roundness of diamond cutting tools based on atomic force microscopy , 2009 .

[38]  H. Seki,et al.  Triboattraction: friction under negative load , 1990 .

[39]  Tao Sun,et al.  Contact accuracy and orientations affecting the lapped tool sharpness of diamond cutting tools by mechanical lapping , 2006 .

[40]  Reinhart Job,et al.  Thermochemical polishing of CVD diamond films , 1998 .