Performance study of chromeless phase lithography mask for the 65nm node and beyond

Chromeless Phase Lithography (CPL) is one of resolution enhancement technologies (RET) for 65nm node and beyond. CPL has various advantages such as no necessity of double exposure, and small pattern displacement and CD error caused by the intensity imbalance. The high resolution lithography can be expected with the combination of high NA and off-axis illumination (OAI) in 193nm lithography. It is known that CPL can flexibly change structure through gate pitch. There are various kinds of structure, such as pure CPL, Zebra, Rim, and Stripe. And there are also various kinds of scattering bar depending on the gate pitch. In this paper, we estimated normalized image log-slope (NILS), mask error enhancement factor (MEEF), depth of focus (DOF) and phase shift depth for each CPL structure by rigorous 3D mask electro-magnetic field (EMF) simulation on mask topographies. And it was found that Zebra and Stripe can improve NILS, and Stripe is most effective to improve MEEF for narrow pitch. There is no large difference in DOF between all structures, and DOF for all structures with wide pitch can be expanded by the addition of chrome scattering bar. We evaluated the impact of phase shift depth and found that the optimal phase shift depths of all structures are larger than 180degrees. The improvement of mask-making accuracy becomes more important to achieve better mask pattern resolution. Therefore, we focused on the defects of the sub-resolution chrome feature and chrome scattering bar. It was found that the defects of sub-resolution chrome feature have big influences on the lithography performance. And the defects of scattering bars become more sensitive with closer to the main feature.