Investigation of Pt-Salt-Doped-Standalone- Multiwall Carbon Nanotubes for On-Chip Interconnect Applications

In this paper, we investigate, by combining electrical measurements with an atomistic-to-circuit modeling approach, the conductance of doped standalone multiwall carbon nanotubes (CNTs) as a viable candidate for the next generation of back-end-of-line interconnects. Ab initio simulations predict a doping-related shift of the Fermi level, which reduces shell chirality variability and improves electrical resistivity up to 90% by converting semiconducting shells to metallic. Electrical measurements of Pt-salt-doped CNTs provide up to 50% of resistance reduction, which is a milestone result for future CNT interconnect technology. Moreover, we find that defects and contacts introduce additional resistance, which limits the efficiency of doping, and are the primary cause for the mismatch between theoretical predictions and experimental measurements on doped CNTs.

[1]  Shinobu Fujita,et al.  A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors. , 2008, Nano letters.

[2]  Philip G. Collins,et al.  Defects and disorder in carbon nanotubes , 2009 .

[3]  D. Kalita,et al.  Self-organized growth of bamboo-like carbon nanotube arrays for field emission properties , 2012, Applied Nanoscience.

[4]  Saurabh Sinha,et al.  Replacing copper interconnects with graphene at a 7-nm node , 2017, 2017 IEEE International Interconnect Technology Conference (IITC).

[5]  Kong,et al.  Nanotube molecular wires as chemical sensors , 2000, Science.

[6]  P. McEuen,et al.  Single-walled carbon nanotube electronics , 2002 .

[7]  Jian Li,et al.  Carbon nanotube in different shapes , 2009 .

[8]  Pugach Nataliya,et al.  International roadmap for devices and systems. Cryogenic electronics and quantum information processing. 2018 Update , 2019 .

[9]  P. Burke.  Luttinger liquid theory as a model of the gigahertz electrical properties of carbon nanotubes , 2002 .

[10]  A. Asenov,et al.  Variability Study of MWCNT Local Interconnects Considering Defects and Contact Resistances—Part II: Impact of Charge Transfer Doping , 2018, IEEE Transactions on Electron Devices.

[11]  Robert Vajtai,et al.  Iodine doped carbon nanotube cables exceeding specific electrical conductivity of metals , 2011, Scientific reports.

[12]  K. Banerjee,et al.  Scaling analysis of multilevel interconnect temperatures for high-performance ICs , 2005, IEEE Transactions on Electron Devices.

[13]  K. Banerjee,et al.  Circuit Modeling and Performance Analysis of Multi-Walled Carbon Nanotube Interconnects , 2008, IEEE Transactions on Electron Devices.

[14]  Zhong Lin Wang,et al.  Carbon nanotube quantum resistors , 1998, Science.

[15]  J. Shapter,et al.  Recent Development of Carbon Nanotube Transparent Conductive Films. , 2016, Chemical reviews.

[16]  Zhihong Chen,et al.  Length scaling of carbon nanotube transistors. , 2010, Nature nanotechnology.

[17]  J. Robertson,et al.  Efficient Transfer Doping of Carbon Nanotube Forests by MoO3. , 2015, ACS nano.

[18]  Wei Zhang,et al.  Investigation on nanotube-metal contacts under different contact types , 2015 .

[19]  Charles M. Lieber,et al.  Resonant electron scattering by defects in single-walled carbon nanotubes. , 2001, Science.

[20]  H J Li,et al.  Multichannel ballistic transport in multiwall carbon nanotubes. , 2005, Physical review letters.

[21]  T. N. Todorov,et al.  Carbon nanotubes as long ballistic conductors , 1998, Nature.

[22]  Zettl,et al.  Extreme oxygen sensitivity of electronic properties of carbon nanotubes , 2000, Science.

[23]  O. Richard,et al.  Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition , 2012 .

[24]  W. Steinhögl,et al.  Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller , 2005 .

[25]  R. Ramos,et al.  Record resistivity for in-situ grown horizontal carbon nanotubes interconnects , 2014 .

[26]  Chinmay Kulkarni,et al.  Carbon nanotubes as interconnects , 2010 .

[27]  G. Eda,et al.  Improved conductivity of transparent single-wall carbon nanotube thin films via stable postdeposition functionalization , 2007 .

[28]  Kaustav Banerjee,et al.  Performance analysis of carbon nanotube interconnects for VLSI applications , 2005, ICCAD-2005. IEEE/ACM International Conference on Computer-Aided Design, 2005..

[29]  M. H. van der Veen,et al.  Electron mean-free path for CNT in vertical interconnects approaches Cu , 2014, IEEE International Interconnect Technology Conference.

[30]  B. Gotsmann,et al.  A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects , 2017, 2017 IEEE International Electron Devices Meeting (IEDM).

[31]  Asen Asenov,et al.  A Survey of Carbon Nanotube Interconnects for Energy Efficient Integrated Circuits , 2015, IEEE Circuits and Systems Magazine.

[32]  A. B. Kaiser,et al.  Effect of chemical treatment on electrical conductivity, infrared absorption, and Raman spectra of single-walled carbon nanotubes. , 2005, The journal of physical chemistry. B.