论文信息 - Observation of Si out-diffusion related defects in SiC growth on Si(001) - 字舞流文

Observation of Si out-diffusion related defects in SiC growth on Si(001)

D. Aubel | A. Claverie | M. Diani | L. Kubler | J. Bischoff | A. Mesli | T. Heiser | J. Balladore | S. Peyre