Accurate Micro-Tool Manufacturing by Iterative Pulsed-Laser Ablation

Iterative processing solutions, including multiple cycles of material removal and measurement, are capable of achieving higher geometric accuracy by compensating for most deviations manifesting directly on the workpiece. Remaining error sources are the measurement uncertainty and the repeatability of the material-removal process including clamping errors. Due to the lack of processing forces, process fluids and wear, pulsed-laser ablation has proven high repeatability and can be realized directly on a measuring machine. This work takes advantage of this possibility by implementing an iterative, laser-based correction process for profile deviations registered directly on an optical measurement machine. This way efficient iterative processing is enabled, which is precise, applicable for all tool materials including diamond and eliminates clamping errors. The concept is proven by a prototypical implementation on an industrial tool measurement machine and a nanosecond fibre laser. A number of measurements are performed on both the machine and the processed workpieces. Results show production deviations within 2 μm diameter tolerance.