Analytic waveguide solutions and the coherence probe microscope
暂无分享,去创建一个
[1] P. Dirac. Principles of Quantum Mechanics , 1982 .
[2] D. K. Vaughan,et al. Calculation Of Light Scatter From Structures On Silicon Surfaces , 1987, Advanced Lithography.
[3] C. P. Kirk,et al. Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory , 1988 .
[4] Mark P. Davidson,et al. An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology , 1987, Advanced Lithography.
[5] Emil Wolf,et al. Principles of Optics: Contents , 1999 .
[6] Michael S. Yeung,et al. Modeling High Numerical Aperture Optical Lithography , 1988, Advanced Lithography.