A Curve Interpretation and Diagnostic Technique for Industrial Processes

[1]  B. Flinchbaugh,et al.  Monitoring and diagnosis of plasma etch processes , 1988 .

[2]  D.M. O'Neill,et al.  A knowledge-based approach to real time signal monitoring , 1989, [1989] Proceedings. The Fifth Conference on Artificial Intelligence Applications.

[3]  Marwan A. Simaan,et al.  Automatic recognition of primitive changes in manufacturing process signals , 1988, Pattern Recognit..

[4]  Kenneth D. Forbus Interpreting Observations of Physical Systems , 1987, IEEE Transactions on Systems, Man, and Cybernetics.

[5]  Jeff Rickel,et al.  Knowledge-Based Simulation of a Glass Annealing Process: An AI Application in the Glass Industry , 1986, AAAI.

[6]  T. Budge,et al.  PARSEC: process analysis with recipe support for etcher control , 1989, IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

[7]  Thomas W. Parsons,et al.  Voice and Speech Processing , 1986 .