A Curve Interpretation and Diagnostic Technique for Industrial Processes
暂无分享,去创建一个
[1] B. Flinchbaugh,et al. Monitoring and diagnosis of plasma etch processes , 1988 .
[2] D.M. O'Neill,et al. A knowledge-based approach to real time signal monitoring , 1989, [1989] Proceedings. The Fifth Conference on Artificial Intelligence Applications.
[3] Marwan A. Simaan,et al. Automatic recognition of primitive changes in manufacturing process signals , 1988, Pattern Recognit..
[4] Kenneth D. Forbus. Interpreting Observations of Physical Systems , 1987, IEEE Transactions on Systems, Man, and Cybernetics.
[5] Jeff Rickel,et al. Knowledge-Based Simulation of a Glass Annealing Process: An AI Application in the Glass Industry , 1986, AAAI.
[6] T. Budge,et al. PARSEC: process analysis with recipe support for etcher control , 1989, IEEE/SEMI International Semiconductor Manufacturing Science Symposium.
[7] Thomas W. Parsons,et al. Voice and Speech Processing , 1986 .