Design and fabrication of two-axis micromachined steel scanners
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Baykal Sarioglu | Arda D. Yalcinkaya | Yigit Daghan Gokdel | Senol Mutlu | A. Yalçinkaya | S. Mutlu | Y. D. Gokdel | B. Sarıoǧlu
[1] Weileun Fang,et al. A Novel Coilless Scanning Mirror Using Eddy Current Lorentz Force and Magnetostatic Force , 2007, Journal of Microelectromechanical Systems.
[2] Alan C. West,et al. Shape Changes during Through‐Mask Electrochemical Micromachining of Thin Metal Films , 1992 .
[3] Takashi Mineta. Electrochemical etching of a shape memory alloy using new electrolyte solutions , 2004 .
[4] Hakan Urey,et al. Performance of a biaxial MEMS-based scanner for microdisplay applications , 2000, SPIE MOEMS-MEMS.
[5] H. Urey,et al. Modeling and Characterization of Soft Magnetic Film Actuated 2-D Scanners , 2007, IEEE Journal of Selected Topics in Quantum Electronics.
[6] P. Reinhall,et al. Scanning Polymeric Waveguide Design of a 2-D Display System , 2008, Journal of Display Technology.
[7] Harumichi Sato,et al. High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method , 2007 .
[8] D. Kunze,et al. Large deflection micromechanical scanning mirrors for linear scans and pattern generation , 2000, IEEE Journal of Selected Topics in Quantum Electronics.
[9] A. Yalçinkaya,et al. Two-axis electromagnetic microscanner for high resolution displays , 2006, Journal of Microelectromechanical Systems.
[10] Hakan Urey,et al. Torsional MEMS scanner design for high-resolution display systems , 2002 .
[11] Arda D. Yalcinkaya,et al. Polymer magnetic scanners for bar code applications , 2007 .
[12] P. Sarro,et al. Electrostatic aluminum micromirrors using double-pass metallization , 1997 .
[13] Yogesh B. Gianchandani,et al. Achieving precision in high density batch mode micro-electro-discharge machining , 2008 .
[14] D. Landolt,et al. Fundamental aspects and applications of electrochemical microfabrication , 2000 .
[15] Hakan Urey,et al. Torsional MEMS scanner design for high-resolution scanning display systems , 2002, SPIE Optics + Photonics.
[16] G. Fedder,et al. A two-axis electrothermal micromirror for endoscopic optical coherence tomography , 2004, IEEE Journal of Selected Topics in Quantum Electronics.
[17] A. Uhlir. Electrolytic shaping of germanium and silicon , 1956 .
[18] Shi Hyoung Ryu,et al. Micro electrochemical milling , 2005 .
[19] Chang-Hyeon Ji,et al. Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field , 2007, Journal of Microelectromechanical Systems.
[20] Gerhard Ertl,et al. Electrochemical machining of stainless steel microelements with ultrashort voltage pulses , 2001 .