Finite-element modeling of nanoindentation

Procedures have been developed based on finite-element modeling of nanoindentation data to obtain the mechanical properties of thin films and ion-beam-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, Young’s elastic modulus, and layer hardness from indentations as deep as 50% of the layer thickness or more. We have used these procedures to evaluate materials ranging from ion implanted metals to deposited, diamond-like carbon layers. The technique increases the applicability of indentation testing to very thin layers, composite layers, and modulated compositions. This article presents an overview of the procedures involved and illustrates them with selected examples.

[1]  M. Dugger,et al.  Mechanical properties of nickel ion-implanted with titanium and carbon and their relation to microstructure , 1998 .

[2]  J. Ager,et al.  Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials , 1998 .

[3]  Alexei Bolshakov,et al.  Nanoindentation of soft films on hard substrates: Experiments and finite element simulations , 1997 .

[4]  D. Tallant,et al.  Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond , 1997 .

[5]  David M. Follstaedt,et al.  Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films , 1997 .

[6]  D. Follstaedt,et al.  Evaluating mechanical properties of thin layers using nanoindentation and finite-element modeling: Implanted metals and deposited layers , 1996 .

[7]  T. Christenson,et al.  Hardening of nickel alloys by ion implantation of titanium and carbon , 1996 .

[8]  G. Pharr,et al.  Inaccuracies in Sneddon`s solution for elastic indentation by a rigid cone and their implications for nanoindentation data analysis , 1996 .

[9]  D. Follstaedt,et al.  Mechanical properties of high strength aluminum alloys formed by pulsed laser deposition , 1995 .

[10]  George M. Pharr,et al.  Measurement of Thin Film Mechanical Properties Using Nanoindentation , 1992 .

[11]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[12]  Tod A. Laursen,et al.  A study of the mechanics of microindentation using finite elements , 1992 .

[13]  George M. Pharr,et al.  On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation , 1992 .

[14]  R. J. Bourcier,et al.  Mechanical characterization of several ion-implanted alloys: nanoindentation testing, wear testing and finite element modeling☆ , 1991 .

[15]  William D. Nix,et al.  A method for interpreting the data from depth-sensing indentation instruments , 1986 .

[16]  D. Follstaedt.  Implantation of Ti + C for reduced friction and wear of steels , 1985 .

[17]  W. Oliver,et al.  Hardness measurement at penetration depths as small as 20 nm , 1983 .

[18]  I. N. Sneddon.  The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile , 1965 .

[19]  David Tabor,et al.  Elastic Recovery of Conical Indentations , 1961 .

[20]  G. Pharr,et al.  Applicability of Sneddon Relationships to the Real Case of a Rigid Cone Penetrating an Infinite Half Space , 1998 .

[21]  Yang-Tse Cheng,et al.  Analysis of indentation loading curves obtained using conical indenters , 1998 .

[22]  David M. Follstaedt,et al.  Precipitate-hardened aluminum alloys formed using pulsed laser deposition , 1996 .

[23]  G. Pharr,et al.  Effects of Residual Stress on the Measurement of Hardness and Elastic Modulus using Nanoindentation , 1994 .

[24]  J. Field.  The Properties of natural and synthetic diamond , 1992 .

[25]  W. Nix,et al.  Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates , 1988 .

[26]  Howard E. Boyer,et al.  Atlas of stress-strain curves , 1987 .

[27]  R. King,et al.  Elastic analysis of some punch problems for a layered medium , 1987 .

[28]  A. Inoue,et al.  Nonequilibrium Phases in Fe–X–C (X=Cr, Mo or W) Ternary Alloys Quenched Rapidly from Melts , 1981 .