The electrostatic problem for the SAW interdigital transducers in an external electric field. I. A general solution for a limited number of electrodes

An exact solution for finding the surface charge and electric field distributions in interdigital transducers (IDTs) with a limited number N of electrodes is given. It is based on the Keldysh-Sedov solution to the mixed boundary problem of the analytic function theory. The IDT electrodes are placed on the plane boundary between two anisotropic dielectric media. The external electric field may arbitrarily vary along the structure. The solution contains N constants which may be found from the electrodes' connection conditions. For determining these constants a linear set of algebraic equations is obtained. The coefficients of this system are written in explicit form. The capacitance coefficients for a system of electrodes of different widths are obtained. For illustration purposes systems with one and two electrodes are considered in greater detail. In these cases the external electric field is assumed to vary harmonically along the structure with an arbitrary wavenumber. For one electrode the Fourier transform of the charge distribution is obtained in terms of the Bessel functions. For two electrodes of different widths a simple expression for the capacitance is found. The charge and electric field distributions are represented graphically for several wavenumbers and geometrical sizes of the electrode system. Section I contains a survey, including Russian literature, which is not well known in the west.

[1]  T. Aoki,et al.  Acoustic Surface Waves in Split Strip Periodic Metal Gratings on a Piezoelectric Surface , 1977, IEEE Transactions on Sonics and Ultrasonics.

[2]  S.V. Biryukov,et al.  The electrostatic problem for the SAW interdigital transducers in an external electric field. II. Periodic structures , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  Kenneth R. Laker,et al.  Electric Field Interactions Within Finite Arrays and the Design of Withdrawal Weighted SAW Filters at Fundamental and Higher Harmonics , 1976 .

[4]  C. S. Hartmann,et al.  An efficient evaluation of the electrostatic fields in IDTs with periodic electrode sequences , 1993 .

[5]  H. Skeie,et al.  Acoustic surface waves in piezoelectric materials with periodic metal strips on the surface , 1973 .

[6]  P. R. Emtage Self‐Consistent Theory of Interdigital Transducers , 1972 .

[7]  C. S. Hartmann,et al.  End Effects in Interdigital Surface Wave Transducers , 1972 .

[8]  R.C. Peach A General Approach to the Electrostatic Problem of the SAW Interdigital Transducer , 1981, IEEE Transactions on Sonics and Ultrasonics.

[9]  Analysis of Nonperiodic SAW Transducers Using a Circuit Model , 1980, IEEE Transactions on Sonics and Ultrasonics.

[10]  H. Engan,et al.  Excitation of elastic surface waves by spatial harmonics of interdigital transducers , 1969 .

[11]  S. Biryukov,et al.  Derivation of COM equations for the SAW IDT , 1994, 1994 Proceedings of IEEE Ultrasonics Symposium.

[12]  B. J. Hunsinger,et al.  A Generalized Model for Periodic Transducers with Arbitrary Voltages , 1978 .

[13]  M. Redwood,et al.  Analysis of Generation and Detection of Surface and Bulk Acoustic Waves by Interdigital Transducers , 1977, IEEE Transactions on Sonics and Ultrasonics.

[14]  S. Datta,et al.  Element Factor for Periodic Transducers , 1980, IEEE Transactions on Sonics and Ultrasonics.

[15]  Richard M. White,et al.  Excitation and Detection of Surface Elastic Waves in Piezoelectric Crystals , 1969 .

[16]  C. Chu Propagation of Waves in Helical Wave Guides , 1958 .

[17]  W. Pedler,et al.  Fundamental- and Harmonic-Frequency Circuit-Model Analysis of Lnterdigital Transducers with Arbitralry Metallization Ratios and Polarity Sequences , 1975 .

[18]  G. A. Coquin,et al.  Analysis of the Excitation and Detection of Piezoelectric Surface Waves in Quartz by Means of Surface Electrodes , 1967 .

[19]  H. Skeie,et al.  A method for analyzing waves in structures consisting of metal strips on dispersive media , 1973 .

[20]  R. Peach The Application of Electrostatic Analysis to Generalized SAW Transducers , 1980 .

[21]  David Morgan,et al.  Surface-wave devices for signal processing , 1985 .

[22]  K.A. Ingebrigtsen,et al.  Equivalent Circuit Parameters of Interdigital Transducers Derived from Dispersion Relations for Surface Acoustic Waves in Periodic Metal Gratings , 1977, IEEE Transactions on Sonics and Ultrasonics.

[23]  M. Weihnacht,et al.  Derivation of COM equations using the surface impedance method , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.